Ladder-type filter including a dielectric film having a side surface with a heightwise inclination
View Patent ↗A ladder-type filter having plural elastic-wave resonators provided on a series arm and a parallel arm in a ladder shape on a piezoelectric substrate. Each of the elastic-wave resonators has an interdigital electrode. The interdigital electrode has plural electrode finger pairs formed of electrode fingers extending from first and second bus bars. The interdigital electrode included in the elastic-wave resonator provided on the parallel arm has an electrode cross width of the electrode fingers extending from the first and second bus bars 23 times or more of the wavelength of elastic waves excited by the interdigital electrodes.
1. A ladder-type filter formed on a piezoelectric substrate, the ladder-type filter comprising:
a plurality of elastic-wave resonators provided on a series arm and a parallel arm in a ladder shape on the piezoelectric substrate;
an interdigital electrode provided in each of the plurality of elastic-wave resonators;
a first bus bar provided in each of the plurality of elastic-wave resonators;
a second bus bar provided in each of the plurality of elastic-wave resonators; and
electrode finger pairs formed of a first electrode finger extending from the first bus bar and a second electrode finger extending from the second bus bar,
wherein the interdigital electrode included in the elastic-wave resonator provided on the parallel arm has an electrode cross width specified by the first electrode finger and the second electrode finger, and the electrode cross width is 23 times or more of a wavelength of an elastic wave excited by the interdigital electrode,
wherein a dielectric film is provided on a top part of an area at which the first electrode fingers and the second electrode fingers cross, and
wherein at least one of a side surface facing the first bus bar and a side surface facing the second bus bar, of the dielectric film has a heightwise inclination.
2. A ladder-type filter formed on a piezoelectric substrate, the ladder-type filter comprising:
a plurality of elastic-wave resonators provided on a series arm and a parallel arm in a ladder shape on the piezoelectric substrate;
an interdigital electrode provided in each of the plurality of elastic-wave resonators;
a first bus bar provided in each of the plurality of elastic-wave resonators;
a second bus bar provided in each of the plurality of elastic-wave resonators; and
electrode finger pairs formed of a first electrode finger extending from the first bus bar and a second electrode finger extending from the second bus bar,
wherein the interdigital electrode included in the elastic-wave resonator provided on the parallel arm has an electrode cross width specified by the first electrode finger and the second electrode finger, and the electrode cross width is 23 times or more of a wavelength of an elastic wave excited by the interdigital electrode,
wherein the interdigital electrode included in the elastic-wave resonator provided on the parallel arm includes a dielectric film on a top part of an area at which the first electrode fingers and the second electrode fingers cross,
wherein a width of the dielectric film is 23 times or more of a wavelength of an elastic wave excited by the interdigital electrode included in the elastic-wave resonator provided on the parallel arm, and
wherein at least one of a side surface facing the first bus bar and a side surface facing the second bus bar, of the dielectric film has a heightwise inclination.