Semiconductor device
View Patent ↗A semiconductor device includes: a high dielectric constant gate insulating film formed on an active region in a substrate; a gate electrode formed on the high dielectric constant gate insulating film; and an insulating sidewall formed on each side surface of the gate electrode. The high dielectric constant gate insulating film is continuously formed so as to extend from under the gate electrode to under the insulating sidewall. At least part of the high dielectric constant gate insulating film located under the insulating sidewall has a smaller thickness than a thickness of part of the high dielectric constant gate insulating film located under the gate electrode.
1. A semiconductor device comprising:
a high dielectric constant gate insulating film formed on an active region in a substrate;
a gate electrode formed on the high dielectric constant gate insulating film;
a insulating sidewall formed on each side surface of the gate electrode; and
wherein the high dielectric constant gate insulating film is continuously formed so as to extend from under the gate electrode to under the insulating sidewall, and
an end of the high dielectric constant gate insulating film under the insulating sidewall is located at a predetermined distance from an outer end of the insulating sidewall toward the gate electrode.
2. The semiconductor device of claim 1 , further comprising a buffer insulating film between the substrate and the high dielectric constant gate insulating film.
3. The semiconductor device of claim 2 , wherein the buffer insulating film is a silicon oxide film.
4. The semiconductor device of claim 2 , wherein
the buffer insulating film is continuously formed so as to extend from under the gate electrode to under the insulating sidewall, and
an end of the buffer insulating film is located at a predetermined distance from an outer end of the insulating sidewall toward the gate electrode.
5. The semiconductor device of claim 1 , wherein
a smallest thickness of part of the high dielectric constant gate insulating film located under the insulating sidewall is smaller than that of part of the high dielectric constant gate insulating film located under the gate electrode.
6. The semiconductor device of claim 1 , wherein
the high dielectric constant gate insulating film is formed of a Hf based oxide.
7. The semiconductor device of claim 1 , wherein
the high dielectric constant gate insulating film is formed of a HfSiON film.
8. The semiconductor device of claim 1 , wherein
an extension region of a first conductivity type is formed in part of the active region located under the insulating sidewall, and
a pocket region of a second conductivity type is formed in part of the active region located under the extension region.
9. The semiconductor device of claim 8 , wherein
each of source/drain regions of a first conductivity type is formed in part of the active region located in an external side to the extension region and the pocket region when viewed from the gate electrode.
10. The semiconductor device of claim 1 , wherein
a part of the high dielectric constant gate insulating film located under the insulating sidewall includes a notch at the end thereof.
11. The semiconductor device of claim 1 , wherein
a part of the high dielectric constant gate insulating film located under the insulating sidewall has a thickness of 2 nm or less.
12. The semiconductor device of claim 2 , wherein
an end of the buffer insulating film is located at a predetermined distance from a side end of the gate electrode toward the insulating sidewall.
13. The semiconductor device of claim 1 , wherein
the end of the high dielectric constant gate insulating film is located at a predetermined distance from a side end of the gate electrode toward the insulating sidewall.
14. The semiconductor device of claim 1 , wherein
the insulating sidewall has a double layer structure including an oxide film and a nitride film.
15. The semiconductor device of claim 1 , wherein
wherein the insulating sidewall has a triple layer structure including a first oxide film, a nitride film and a second oxide film.
16. The semiconductor device of claim 1 , wherein
a width of the high dielectric constant gate insulating film along a gate length is larger than a width of the gate electrode along the gate length.
17. The semiconductor device of claim 1 , wherein
a width of a bottom surface of the high dielectric constant gate insulating film along a gate length is larger than a width of a bottom surface of the gate electrode along the gate length.
18. The semiconductor device of claim 1 , wherein
the high dielectric constant gate insulating film has a relative dielectric constant of 10 or more.
19. The semiconductor device of claim 1 , wherein
the high dielectric constant gate insulating film has a larger relative dielectric constant than that of the insulating sidewall.
20. The semiconductor device of claim 1 , wherein
the high dielectric constant gate insulating film is formed to have a convex cross-sectional shape.
21. The semiconductor device of claim 1 , wherein
the end of the high dielectric constant gate insulating film located under the insulating sidewall has a tapered surface.
22. The semiconductor device of claim 1 , wherein
the high dielectric constant gate insulating film located under the insulating sidewall has a thickness which becomes smaller toward the end thereof.