Spectroscopic sensor device and electronic equipment
View Patent ↗A spectroscopic sensor that applies lights in a wavelength band containing plural wavelengths to an object and spectroscopically separates reflected lights or transmitted lights from the object using plural light band-pass filters that transmit the respective specific wavelengths and plural photosensor parts to which corresponding transmitted lights are input based on output results of independent photosensors. The spectroscopic sensor may be integrated in a semiconductor device or module by integration using a semiconductor process and downsizing may be realized.
1. A spectroscopic sensor device comprising:
a light source unit that applies a light in a wavelength band containing a target wavelength of detection; and
a spectroscopic sensor that obtains an incident light from the light source unit reflected from or transmitted through an object,
wherein the spectroscopic sensor includes:
a light band-pass filter,
a photosensor that has an impurity area to sense light of the target wavelength, and
an angle limiting filter that limits an incident angle of light passing from the light band-pass filter to the photosensor,
wherein the angle limiting filter includes a light blocking material disposed directly on a portion of the impurity area.
2. The spectroscopic sensor device of claim 1 , wherein the impurity area has a first area in contact with the light blocking material, and a second area not in contact with the light blocking material, the second area sensing a light through the angle limiting filter.
3. The spectroscopic sensor device of claim 1 , wherein
the photosensor and the angle limiting filter are formed using a semiconductor process.
4. The spectroscopic sensor device of claim 1 , wherein the light source unit and the spectroscopic sensor are disposed on a same substrate.
5. The spectroscopic sensor device of claim 1 , wherein the light band-pass filter is disposed directly on the angle limiting filter.
6. The spectroscopic sensor device of claim 1 , further comprising:
a light blocking member which prohibits incident light from the light source unit from directly entering the spectroscopic sensor, and is provided between the light source unit and the spectroscopic sensor.
7. Electronic equipment comprising the spectroscopic sensor device according to claim 1 .