Elastic wave device
View Patent ↗An elastic wave device includes a piezoelectric substrate, an IDT electrode disposed on the piezoelectric substrate, an internal electrode disposed on the piezoelectric substrate and connected to the IDT electrode, a support pillar disposed on the piezoelectric substrate and provided around the IDT electrode, a top panel provided on the support pillar to cover a space above the IDT electrode, an insulation protector provided to cover the support pillar and the top panel, an external electrode disposed on the insulation protector, a conductor pattern disposed on the insulation protector in order to obtain inductance, and a connection electrode provided through the insulation protector, to connect the external electrode and the internal electrode to each other.
1. An elastic wave device comprising:
a piezoelectric substrate;
an interdigital transducer (IDT) electrode disposed on the piezoelectric substrate:
an internal electrode disposed above the piezoelectric substrate and connected to the IDT electrode;
a support pillar disposed above the piezoelectric substrate and provided around the IDT electrode;
a top panel provided above the support pillar to cover a space above the IDT electrode;
an insulation protector provided to cover the support pillar and the top panel;
an external electrode disposed above the insulation protector;
a conductor pattern disposed above the insulation protector for obtaining inductance;
and
a connection electrode provided through the insulation protector for connecting the external electrode to the internal electrode, wherein
at least part of the top panel is made of metal and connected to the connection electrode so that the top panel has a ground potential.
2. The elastic wave device according to claim 1 , further comprising
a protector that covers the conductor pattern.
3. The elastic wave device according to claim 1 , wherein
the conductor pattern and the top panel are separated from each other by at least 15 μm.
4. The elastic wave device according to claim 1 , wherein
the conductor pattern is connected to a plurality of connection electrodes having the ground potential.
5. An elastic wave device comprising:
a piezoelectric substrate;
an interdigital transducer (IDT) electrode disposed on the piezoelectric substrate:
an internal electrode disposed above the piezoelectric substrate and connected to the IDT electrode;
a support pillar disposed above the piezoelectric substrate and provided around the IDT electrode;
a top panel provided above the support pillar to cover a space above the IDT electrode;
an insulation protector provided to cover the support pillar and the top panel;
an external electrode disposed above the insulation protector for obtaining inductance; and
a connection electrode provided through the insulation protector for connecting the external electrode to the internal electrode, wherein
the conductor pattern is connected to a plurality of connection electrodes having a ground potential,
the plurality of connection electrodes includes a first ground electrode, a second ground electrode, and a third ground electrode,
the first ground electrode is connected to the internal electrode and the conductor pattern,
the second ground electrode is connected to the conductor pattern and the top panel, and
the third ground electrode is connected to the top panel and the external electrode.
6. The elastic wave device according to claim 5 , further comprising a protector that covers the conductor pattern.
7. The elastic wave device according to claim 5 , wherein the conductor pattern and the top panel are separated from each other by at least 15 μm.