Thin film transistor having improved manufacturability and method for manufacturing a display panel containing same
View Patent ↗Embodiments of the present invention relate to a thin film transistor and a manufacturing method of a display panel, and include forming a gate line including a gate electrode on a substrate, forming a gate insulating layer on the gate electrode, forming an intrinsic semiconductor on the gate insulating layer, forming an extrinsic semiconductor on the intrinsic semiconductor, forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor, and plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode to form a protection member and ohmic contacts on respective sides of the protection member. Accordingly, the process for etching the extrinsic semiconductor and forming an inorganic insulating layer for protecting the intrinsic semiconductor may be omitted such that the manufacturing process of the display panel may be simplified, manufacturing cost may be reduced, and productivity may be improved.
1. A manufacturing method of a display panel, comprising:
forming a gate line including a gate electrode on a substrate;
forming a gate insulating layer on the gate electrode;
forming an intrinsic semiconductor on the gate insulating layer;
cleaning the intrinsic semiconductor after forming the intrinsic semiconductor;
forming an extrinsic semiconductor on the intrinsic semiconductor after cleaning the intrinsic semiconductor layer;
forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor; and
plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode so as to form a protection member comprising at least one of a silicon oxide and a nitride material, respective sides of the protection member comprising ohmic contacts.
2. The manufacturing method of claim 1 , wherein
the cleaning the intrinsic semiconductor uses hydrogen fluoride.
3. A manufacturing method of a display panel, comprising:
forming a gate line including a gate electrode on a substrate;
forming a gate insulating layer on the gate electrode;
forming an intrinsic semiconductor on the gate insulating layer;
forming an extrinsic semiconductor on the intrinsic semiconductor;
forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor;
plasma-treating the extrinsic semiconductor between the source electrode and the drain electrode so as to form a protection member comprising at least one of a silicon oxide and a nitride material, respective sides of the protection member comprising ohmic contacts; and
plasma-treating a portion of the intrinsic semiconductor between the source electrode and the drain electrode,
wherein the plasma-treating the extrinsic semiconductor further comprises plasma-treating an entire thickness of the extrinsic semiconductor.
4. The manufacturing method of claim 3 , further comprising forming a photosensitive member on a source electrode region, a drain electrode region and a channel forming region, wherein the plasma-treating a portion of the extrinsic semiconductor and the plasma treating the intrinsic semiconductor are performed while the photosensitive member remains on the source electrode and the drain electrode.
5. The manufacturing method of claim 4 , further comprising etching the extrinsic semiconductor and the intrinsic semiconductor, and ashing the photosensitive member on the channel forming region, wherein the forming a data line, the etching the extrinsic semiconductor and the intrinsic semiconductor, the ashing the photosensitive member on the channel forming region and the plasma-treating are performed in a same chamber.
6. A manufacturing method of a display panel, comprising:
forming a gate line including a gate electrode on a substrate;
forming a gate insulating layer on the gate electrode;
forming an intrinsic semiconductor on the gate insulating layer;
forming an extrinsic semiconductor on the intrinsic semiconductor;
forming a data line forming material on the extrinsic semiconductor;
forming a photosensitive member on a source electrode region, a drain electrode region and a channel forming region;
forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor;
plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode so as to form a protection member comprising at least one of a silicon oxide and a nitride material, respective sides of the protection member comprising ohmic contacts,
wherein the plasma-treating a portion of the extrinsic semiconductor is performed while the photosensitive member remains on the source electrode and the drain electrode.
7. The manufacturing method of claim 6 , further comprising etching the extrinsic semiconductor and the intrinsic semiconductor, and ashing the photosensitive member on the channel forming region, wherein the forming a data line, the etching the extrinsic semiconductor and the intrinsic semiconductor layer, the ashing the photosensitive member on the channel forming region and the plasma-treating a portion of the extrinsic semiconductor are performed in a same chamber.
8. A manufacturing method of a display panel, comprising:
forming a gate line including a gate electrode on a substrate;
forming a gate insulating layer on the gate electrode;
forming an intrinsic semiconductor on the gate insulating layer;
forming an extrinsic semiconductor on the intrinsic semiconductor;
forming a data line forming material on the extrinsic semiconductor;
forming a photosensitive pattern on a source electrode region, a drain electrode region and a channel forming region,
etching the data line forming material, the extrinsic semiconductor and the intrinsic semiconductor;
ashing the photosensitive member on the channel forming region;
etching the data line forming material on the channel forming region; and
plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode so as to form a protection member comprising at least one of a silicon oxide and a nitride material, respective sides of the protection member comprising ohmic contacts,
wherein the forming a data line forming material, the etching an extrinsic semiconductor and an intrinsic semiconductor, the ashing the photosensitive member on the channel forming region and the plasma-treating a portion of the extrinsic semiconductor are performed in a same chamber.
9. A manufacturing method of a display panel, comprising:
forming a gate line including a gate electrode on a substrate;
forming a gate insulating layer on the gate electrode;
forming an intrinsic semiconductor on the gate insulating layer;
forming an extrinsic semiconductor on the intrinsic semiconductor;
forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor; and
plasma-treating the extrinsic semiconductor between the source electrode and the drain electrode so as to form a protection member comprising at least one of a silicon oxide and a nitride material, respective sides of the protection member comprising ohmic contacts; and
plasma-treating a portion of the intrinsic semiconductor between the source electrode and the drain electrode.
10. The manufacturing method of claim 9 , further comprising forming a photosensitive member on a source electrode region, a drain electrode region and a channel forming region, wherein the plasma-treating the extrinsic semiconductor and the plasma-treating a portion of the intrinsic semiconductor are performed while the photosensitive member remains on the source electrode and the drain electrode.
11. The manufacturing method of claim 10 , further comprising etching an extrinsic semiconductor and an intrinsic semiconductor, and ashing the photosensitive member on the channel forming region, wherein the forming a data line, the etching an extrinsic semiconductor and an intrinsic semiconductor, the ashing the photosensitive member on the channel forming region and the plasma-treating are performed in a same chamber.
12. The manufacturing method of claim 9 , further comprising forming a photosensitive member on a source electrode region, a drain electrode region and a channel forming region, etching an extrinsic semiconductor and an intrinsic semiconductor, and ashing the photosensitive member on the channel forming region, wherein the forming a data line, the etching an extrinsic semiconductor layer and an intrinsic semiconductor layer, the ashing the photosensitive member on the channel forming region and the plasma-treating a portion of the extrinsic semiconductor and the plasma-treating a portion of the intrinsic semiconductor are performed in a same chamber.
13. A manufacturing method of a display panel, comprising:
forming a gate line including a gate electrode on a substrate;
forming a gate insulating layer on the gate electrode;
forming an intrinsic semiconductor on the gate insulating layer;
forming an extrinsic semiconductor on the intrinsic semiconductor;
forming a data line forming material on the extrinsic semiconductor; and
forming a photosensitive member on a source electrode region, a drain electrode region and a channel forming region,
forming a source electrode and a drain electrode;
plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode so as to form a protection member comprising at least one of a silicon oxide and a nitride material, respective sides of the protection member comprising ohmic contacts,
wherein the plasma treating a portion of the extrinsic semiconductor is performed while the photosensitive member remains on the source electrode and the drain electrode.
14. The manufacturing method of claim 13 , further comprising etching the extrinsic semiconductor and the intrinsic semiconductor, and ashing the photosensitive member on the channel forming region, wherein the forming the data line, the etching the extrinsic semiconductor and the intrinsic semiconductor, the ashing the photosensitive member on the channel forming region and the plasma-treating a portion of the extrinsic semiconductor are performed in a same chamber.
15. A manufacturing method of a display panel, comprising:
forming a gate line including a gate electrode on a substrate;
forming a gate insulating layer on the gate electrode;
forming an intrinsic semiconductor on the gate insulating layer;
forming an extrinsic semiconductor on the intrinsic semiconductor;
forming a data line forming material on the extrinsic semiconductor;
forming a photosensitive pattern on a source electrode region, a drain electrode region and a channel forming region,
etching the data line forming material, the extrinsic semiconductor and the intrinsic semiconductor;
ashing the photosensitive pattern on the channel forming region;
etching the data line forming material on the channel forming region; and
plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode so as to form a protection member comprising at least one of a silicon oxide and a nitride material, respective sides of the protection member comprising ohmic contacts,
wherein the forming a data line forming material, the etching the extrinsic semiconductor and the intrinsic semiconductor, the ashing the photosensitive member on the channel forming region and the plasma-treating a portion of the extrinsic semiconductor are performed in a same chamber.