Method for providing an energy assisted magnetic recording (EAMR) transducer
View Patent ↗A method provides an EAMR transducer. A sacrificial post is provided on an NFT distal from the ABS. This post has an edge proximate and substantially parallel to the ABS. A sacrificial mask is provided on the NFT between the post and the ABS. Optical material(s) are provided. The post is between the optical material(s) and the ABS. The post is removed. A heat sink post corresponding to the post is provided. The heat sink post has a bottom thermally coupled with the NFT and an edge proximate and substantially parallel to the ABS. Part of the heat sink post is removed, forming a heat sink having a top surface at an acute angle from the ABS. Nonmagnetic material(s) are provided on the optical material(s). A pole having a bottom surface thermally coupled with the heat sink and coil(s) are provided.
1. A method for providing an energy assisted magnetic recording (EAMR) transducer coupled with a laser for providing energy and having an air-bearing surface (ABS) configured to reside in proximity to a media during use, the EAMR transducer including a near field transducer (NFT) proximate to the ABS for focusing the energy onto the region of the media, the method comprising:
providing a sacrificial post on a first portion of the NFT distal from the ABS, the sacrificial post having a first edge proximate and substantially parallel to the ABS;
providing a sacrificial mask on a second portion of the NFT between the sacrificial post and the ABS;
providing at least one optical material adjacent to the sacrificial post, the sacrificial post residing between the at least one optical material and the ABS;
removing the sacrificial post;
providing a heat sink post corresponding to the sacrificial post, the heat sink post having a bottom and the first edge proximate and substantially parallel to the ABS, the bottom of the heat sink post being thermally coupled with the NFT;
removing a portion of at least the heat sink post to provide a heat sink having a bottom thermally coupled with the NFT and a top surface at an angle with respect to the ABS, the angle being greater than zero and less than ninety degrees;
providing at least one nonmagnetic material on at least the at least one optical material, the at least one nonmagnetic material having a top surface at a second angle with respect to the ABS,
providing a write pole configured to write to a region of the media, the write pole having a bottom surface, a portion of the bottom surface thermally coupled with the top surface of the heat sink; and
providing at least one coil for energizing the write pole.
2. The method of claim 1 wherein the first portion of the NFT has an NFT cross-sectional shape and wherein the step of providing the sacrificial post further includes:
providing at least one sacrificial post material having a post cross-sectional shape substantially the same as the NFT cross-sectional shape;
providing a resist mask covering at least a portion of the at least one sacrificial post material, the resist mask having a resist mask front edge corresponding to the first edge of the sacrificial post; and
removing an exposed portion of the at least one sacrificial post material to provide the sacrificial post.
3. The method of claim 2 wherein the post cross-sectional shape is a disk.
4. The method of claim 3 wherein the post cross-sectional shape has a post diameter, the NFT cross-sectional shape has an NFT disk diameter, and wherein the post diameter is smaller than the NFT disk diameter.
5. The method of claim 2 further comprising:
removing the resist mask after the sacrificial mask is provided.
6. The method of claim 1 wherein the step of removing the portion of the heat sink post further includes:
providing a milling mask covering at least the at least one optical material; and
ion milling the heat sink post at a milling angle corresponding to the angle.
7. The method of claim 1 wherein the step of providing the at least one nonmagnetic material further includes:
providing at least one mask layer covering the heat sink;
depositing the at least one nonmagnetic material; and
removing the at least one mask layer.
8. The method of claim 1 further comprising:
removing a remaining portion of the sacrificial mask after the at least one nonmagnetic material is provided and before the step of providing the write pole.
9. The method of claim 1 wherein the heat sink includes at least one Au and Cu.
10. The method of claim 1 wherein the at least one optical material includes aluminum oxide.
11. The method of claim 1 wherein the sacrificial post further includes at least one of SiC and amorphous carbon.
12. The method of claim 1 wherein the sacrificial mask includes at least one of NiFe, FeCr, Ru, Cr, and aluminum oxide.
13. The method of claim 1 wherein the step of providing the heat sink post further includes:
depositing a heat sink layer; and
planarizing the transducer.
14. A method for providing an energy assisted magnetic recording (EAMR) transducer coupled with a laser for providing energy and having an air-bearing surface (ABS) configured to reside in proximity to a media during use, the EAMR transducer including a near field transducer (NFT) proximate to the ABS for focusing the energy onto the region of the media, the NFT having an NFT cross-sectional shape, the method comprising:
providing at least one sacrificial post material having a mask cross-sectional shape substantially the same as the NFT cross-sectional shape and residing on a first portion of the NFT;
providing a resist mask covering at least a portion of the at least one sacrificial post material, the resist mask having a resist mask front edge;
removing an exposed portion of the at least one sacrificial post material to provide a sacrificial post, the sacrificial post having a first edge corresponding to the front edge of the sacrificial post mask, the first edge being proximate and substantially parallel to the ABS;
providing a sacrificial mask on a second portion of the NFT between the sacrificial post and the ABS;
removing the resist mask after the sacrificial mask is provided;
providing at least one optical material adjacent to the sacrificial post, the sacrificial post residing between the at least one optical material and the ABS;
removing the sacrificial post;
providing a heat sink post corresponding to the sacrificial post, the heat sink post having a bottom and the first edge proximate and substantially parallel to the ABS, the bottom of the heat sink post being thermally coupled with the NFT;
providing a mask covering at least a portion of the at least one optical material;
ion milling a portion of at least the heat sink post at a milling angle to provide a heat sink having a bottom thermally coupled with the NFT and a top surface at an angle with respect to the ABS, the angle being greater than zero, less than ninety degrees, and corresponding to the milling angle;
providing at least one mask layer covering the heat sink and a portion of the at least one optical material;
depositing at least one nonmagnetic material;
removing the at least one mask layer, a remaining portion of the at least one nonmagnetic material residing on at least the at least one optical material and having a top surface at a second angle with respect to the ABS,
providing a write pole configured to write to a region of the media, the write pole having a bottom surface, a portion of the bottom surface thermally coupled with the top surface of the heat sink; and
providing at least one coil for energizing the write pole.
15. The method of claim 14 further comprising:
removing a remaining portion of the sacrificial mask after the at least one nonmagnetic material is provided and before the step of providing the write pole.