MAGNETIC TRANSFER MASTER SUBSTRATE, MAGNETIC TRANSFER METHOD USING THE SUBSTRATE, AND MAGNETIC TRANSFER MEDIUM
A magnetic transfer master substrate includes a non-magnetic base having depressed portions formed on a surface thereof corresponding to an information signal array, a ferromagnetic body formed in the depressed portions and having a top portion thereof protruding above the surface of the non-magnetic base, and a non-magnetic protective film covering the surface of the non-magnetic base, except for the depressed portion thereof, and also covering a side portion of the ferromagnetic body. A section through the ferromagnetic body, taken perpendicularly to the substrate, includes a round corner, a curvature of which has a radius of no less than 1 nm and no more than 10 nm. The apex of the top portion of the ferromagnetic body protrudes above the surface of the non-magnetic base by 2 nm or more, and protrudes above the surface of the non-magnetic protective film by a distance less than the radius of the curvature.
1 . A magnetic transfer master substrate having a ferromagnetic body pattern corresponding to an information signal array, for transferring an information signal therein to a magnetic recording medium, the substrate comprising:
a non-magnetic base having depressed portions formed on a surface thereof corresponding to the information signal array;
a ferromagnetic body formed in the depressed portions, and having a top portion thereof protruding above the surface of the non-magnetic base; and
a non-magnetic protective film covering the surface of the non-magnetic base, except for the depressed portion thereof, and also covering aside portion of the ferromagnetic body, wherein
a section through the top portion of the ferromagnetic body, taken perpendicularly to the substrate, includes a round corner, a curvature of which has a radius of no less than 1 nm and no more than 10 nm, and
an apex of the top portion of the ferromagnetic body protrudes above the surface of the non-magnetic base by 2 nm or more, and protrudes above the surface of the non-magnetic protective film by a distance less than the radius of the curvature.
2 . A method of manufacturing a magnetic transfer master substrate having a ferromagnetic body pattern corresponding to an information signal array, for transferring an information signal thereinto a magnetic recording medium, the method comprising:
providing a non-magnetic base;
forming depressed portions, corresponding to the information signal array, in a surface of the non-magnetic base;
depositing a ferromagnetic body in the depressed portions and on the surface of the non-magnetic base;
etch-processing the non-magnetic base and the ferromagnetic body, using a smaller etching rate for the ferromagnetic body than for the non-magnetic base, to thereby form the ferromagnetic body pattern, wherein
the ferromagnetic body protrudes above the surface of the non-magnetic base to a height of 2 nm or more, and
a section through the ferromagnetic body, taken perpendicularly to the substrate, includes a round corner, a curvature of which has a radius of no less than 1 nm and no more than 10 nm; and
covering both the surface of the non-magnetic base except for the depressed portion thereof, and a portion of the ferromagnetic body, with a non-magnetic protective film, such that a distance from the surface of the non-magnetic protective film to an apex of the ferromagnetic body is less than the radius of said curvature.
3 . The magnetic transfer master substrate according to claim 1 , wherein the non-magnetic protective film is of a hardness of 1 GPa or less.
4 . A magnetic transfer method for transferring an information signal, from a master substrate having a ferromagnetic body pattern corresponding to an information signal array, to a magnetic recording medium, the master substrate including:
a non-magnetic base having depressed portions formed on a surface thereof corresponding to the information signal array;
a ferromagnetic body formed in the depressed portions, and having a top portion protruding above the surface of the non-magnetic base; and
a non-magnetic protective film covering the surface of the non-magnetic base, except for the depressed portion thereof, and covering a side portion of the ferromagnetic body, wherein
a section through the top portion of the ferromagnetic body, taken perpendicularly to the substrate, includes a round corner, a curvature of which has a radius of no less than 1 nm and no more than 10 nm, and
an apex of the top portion of the ferromagnetic body protrudes above the surface of the non-magnetic base by 2 nm or more, and protrudes above the surface of the non-magnetic protective film by a distance less than the radius of the curvature,
the method comprising:
bringing the master substrate and the magnetic recording medium into contact, one on top of the other;
applying a magnetic field to the contacting master substrate and magnetic recording medium, and recording a magnetization pattern corresponding to the ferromagnetic body pattern of the master substrate on the magnetic recording medium; and
separating the master substrate and the magnetic recording medium.