MASKING MATERIAL, PIEZOELECTRIC VIBRATOR, METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE
Provided are a masking material capable of suppressing the occurrence of pattern blurring when forming a pattern on a substrate by a sputtering method, a piezoelectric vibrator using the masking material, a method of manufacturing the piezoelectric vibrator, and an oscillator, an electronic device, and a radio-controlled timepiece each having the piezoelectric vibrator. A masking material which is used when forming a pattern on a substrate by a sputtering method includes openings corresponding to the pattern, and portions where the openings are not formed have a uniform thickness.
1 . A device for spattering patterns on a wafer, comprising a mask being defined with a plurality of areas in each of which pattern holes are formed and having a thickness substantially uniform across the mask.
2 . The device according to claim 1 , wherein the mask is made of magnetic material.
3 . The device according to claim 2 , wherein the mask is made of stainless steel.
4 . The device according to claim 1 , further comprising a base plate having a loop of ridge elevated to form a recess for receiving the wafer.
5 . The device according to claim 4 , wherein the ridge has a height substantially equal to a thickness of the wafer.
6 . The device according to claim 4 , wherein the mask is large enough to be placed on the ridge.
7 . The device according to claim 4 , wherein the mask is shaped substantially similarly to the base plate.
8 . The device according to claim 1 , further comprising a magnet plate to magnetically secure the mask in place.
9 . A device for spattering patterns on a wafer, comprising a mask being defined with a plurality of areas in each of which a recess is formed with pattern holes being formed in a bottom of the recess, the mask having a thickness substantially uniform across the wafer except the recesses.
10 . The device according to claim 9 , wherein the mask is formed in two layers each having a thickness substantially uniform across the mask.
11 . A method for producing piezoelectric vibrators, comprising:
(a) defining a plurality of first substrates on a first wafer and a plurality of second substrates on a second wafer;
(b) forming patters on the first wafer by spattering, using a mask being defined with a plurality of areas substantially coincident with at least some of the first substrates, each area having pattern holes formed therein, and the mask having a thickness substantially uniform across the mask;
(c) layering the first and second wafers such that at least some of the first substrates substantially coincide respectively with at least some of the corresponding second substrates, wherein a piezoelectric vibrating strip is secured in a respective at least some of coinciding first and second substrates;
(d) cutting off a respective at least some of packages made of coinciding first and second substrates.
12 . The method according to claim 11 , wherein the mask is made of magnetic material.
13 . The method according to claim 12 , wherein the mask is made of stainless steel.