Photoresist composition and method of manufacturing array substrate using the same
View Patent ↗A photoresist composition includes a binder resin, a photo acid generator, an acryl resin having four different types of monomers, and a solvent.
1. A photoresist composition, comprising:
a binder resin;
a photo acid generator;
an acryl resin represented by Chemical Formula 1; and
a solvent,
wherein R 1 , R 2 , R 3 , R 4 , and R 5 each represent a hydrogen atom or an alkyl group having 1-4 carbon atoms, and a, b, d, and e each represent a value in a range of about 0.01 to about 0.99, and the sum of a, b, d, and e is 1.
2. The photoresist composition of claim 1 , wherein a is about 0.5 to about 0.6, b is about 0.25 to about 0.35, d is about 0.05 to about 0.15, and e is about 0.01 to about 0.1.
3. The photoresist composition of claim 2 , wherein the acryl resin is represented by Chemical Formula 2,
4. The photoresist composition of claim 1 , wherein a content of the acryl resin is about 1% to about 20% by weight of the photoresist composition.
5. The photoresist composition of claim 4 , wherein a content of the binder resin is about 1% to about 50% by weight of the photoresist composition.
6. The photoresist composition of claim 4 , wherein a content of the photo acid generator is about 1% to about 20% by weight of the photoresist composition.
7. The photoresist composition of claim 1 , further comprising a hydroxyl phenol derivative being represented by Chemical Formula 3,
wherein R 6 , R 7 , and R 8 each represent an alkyl group having 1-3 carbon atoms.
8. The photoresist composition of claim 7 , wherein R 6 , R 7 , and R 8 each represent a methyl group.
9. The photoresist composition of claim 7 , wherein a content of the hydroxyl phenol derivative is about 1% to about 10% by weight of the photoresist composition.
10. The photoresist composition of claim 1 , wherein a weight average molecular weight of the acryl resin is about 5,000 to about 30,000.
11. The photoresist composition of claim 1 , further comprising an additive, the additive comprising at least one of a dye, an adhesion promoter, and an acid diffusion inhibitor.
12. The photoresist composition of claim 1 , wherein a is about 0.55, b is about 0.3, d is about 0.1, and e is about 0.05.
13. The photoresist composition of claim 1 , wherein the binder resin is cross-linked.
14. The photoresist composition of claim 1 , wherein the binder resin comprises a phenol compound reacted with an aldehyde compound in the presence of an acidic catalyst.