Encapsulated optoelectronic component and method for the production thereof
View Patent ↗A method for encapsulating an optoelectronic component by depositing a diffusion barrier for protection against environmental influences by means of an atmospheric pressure plasma on at least one subarea of the surface of the optoelectronic component.
1. A method for encapsulating an optoelectronic component, comprising the steps of:
A) providing the optoelectronic component; wherein method step A) comprises the following method sub-steps:
A1) providing a substrate;
A2) applying a first electrode layer to the substrate;
A3) applying an organic functional layer to the first electrode layer;
A4) applying a second electrode layer to the organic functional layer;
wherein a layer stack with main surfaces and side surfaces is formed, which comprises the first electrode layer, the second electrode layer and the organic functional layer;
A5) applying a first encapsulating layer to the second electrode layer wherein a glass cover plate with a main surface facing away from the layer stack and side surfaces is used for the first encapsulating layer; and
B) depositing a diffusion barrier for protection against environmental influences by means of an atmospheric pressure plasma to the side surfaces of the layer stack and the side surfaces of the glass cover plate leaving the main surface of the cover plate facing away from the layer stack substantially free of the diffusion barrier, wherein the optoelectronic component is encapsulated such that no cavity is formed between the diffusion layer and the component.
2. The method according to claim 1 , wherein the diffusion barrier is deposited with a thickness of 50 nm to 1000 nm.
3. The method according to claim 1 , wherein the diffusion barrier is deposited in at least two individual layers with a thickness of 50 to 100 nm each.
4. The method according to claim 1 , wherein in method step B) a plasma beam is used for the deposition of the diffusion barrier to the side surfaces of the layer stack and the side surfaces of the cover plate.
5. The method according to claim 1 , wherein a thin-film encapsulating layer is applied to the second electrode layer in an additional method step after A4) and wherein the diffusion barrier is also applied to the side surfaces of the thin-film encapsulating layer.
6. The method according to claim 1 , wherein a conductive transparent layer is applied to the substrate in an additional method step between method steps A1) and A2).
7. The method according to claim 5 , wherein a second encapsulating layer is applied to the thin-film encapsulating layer in an additional method step, and wherein the diffusion barrier is also applied to the side surfaces of the second encapsulating layer.
8. An optoelectronic component comprising a layer stack with main surfaces and side surfaces that comprises:
a first substrate;
a first electrode layer arranged on the first substrate;
an organic functional layer arranged on the first electrode layer;
a second electrode layer arranged on the organic functional layer;
a first encapsulating layer arranged above the second electrode layer, wherein the first encapsulating layer is a glass cover plate with a main surface facing away from the layer stack and side surfaces; and
a diffusion barrier which comprises SiO 2 and was deposited to the side surfaces of the layer stack and the side surfaces of the glass cover plate by atmospheric pressure plasma, wherein the main surface of the cover plate facing away from the layer stack is substantially free of the diffusion barrier and wherein the optoelectronic component is encapsulated such that no cavity is formed between the diffusion barrier and the component.
9. An optoelectronic component comprising:
a first substrate;
a conductive transparent layer arranged directly on the substrate;
a first electrode layer arranged on the conductive transparent layer;
an organic functional layer arranged on the first electrode layer;
a second electrode layer arranged on the organic functional layer;
a first encapsulating layer arranged on the second electrode layer; and
a diffusion barrier which comprises Si 0 2 and was deposited onto at least one subarea of the surface of the component by atmospheric pressure plasma.
10. An optoelectronic component comprising a layer stack with main surfaces and side surfaces that comprises:
a first substrate;
a first electrode layer arranged on the first substrate;
an organic functional layer arranged on the first electrode layer;
a second electrode layer arranged on the organic functional layer;
a first encapsulating layer arranged above the main surface of the layer stack, wherein the first encapsulating layer is a lacquer layer with a main surface facing away from the layer stack and side surfaces; and
a diffusion barrier which comprises Si 0 2 was deposited to the side surfaces of the layer stack and the side surfaces of the lacquer layer by atmospheric pressure plasma, and wherein the diffusion barrier is additionally deposited on the main surface of the lacquer layer facing away from the layer stack or between the second electrode layer and the lacquer layer.
11. The optoelectronic component according to claim 10 , wherein the diffusion barrier is additionally deposited on the main surface of the lacquer layer facing away from the layer stack and wherein the layer stack comprises a thin-film encapsulating layer arranged on the second electrode layer.
12. The optoelectronic component according to claim 10 , wherein the layer stack comprises a thin-film encapsulating layer arranged on the second electrode layer and the diffusion barrier is additionally deposited between the layer stack and the lacquer layer.