Sensor has combined in-plane and parallel-plane configuration
View Patent ↗A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.
1. A device comprising a sensor for sensing a magnitude of a physical parameter of an environment of the sensor, wherein:
the sensor comprises a first electrode, a second electrode and a material between the first and second electrodes;
the material has an electrical property, whose value depends on the magnitude of the physical parameter;
the first electrode is formed in a first layer, and the second electrode is formed in a second layer different from the first layer;
the first layer includes elevation structures that define a trench in the first layer, the trench having a bottom wall and two side walls;
the material is positioned on the bottom wall and on the two side walls and on top of the elevation structures;
the trench accommodates at least a part of the second electrode; and
the second electrode does not substantially cover the material formed on top of the elevation structures.
2. The device of claim 1 , wherein the material is formed in multiple spatially separated bands across the trench and the elevation structures.
3. The device of claim 1 , wherein the material on top of the elevation structures has one or more grooves or holes.
4. The device of claim 1 , wherein:
the sensor is configured as a capacitive sensor;
the physical parameter is humidity; and
the material includes at least one of: a metal oxide, SiO 2 , SiC, a polyester, Polymethyl methacrylate, Benzocyclobutene, a polysulfate, cellulose acetate butyrate, porous silicon, and silicon nitride.
5. The device of claim 1 , comprising a transponder accommodating the sensor.
6. A device comprising a sensor for sensing a magnitude of a physical parameter of an environment of the sensor, wherein:
the sensor comprises a first electrode, a second electrode and a material between the first and second electrodes;
the material has an electrical property, whose value depends on the magnitude of the physical parameter;
the first electrode is formed in a first layer, and the second electrode is formed in a second layer different from the first layer;
the first layer has a trench and an elevation next to the trench;
the trench has a bottom wall and a side wall;
the material is positioned on the bottom wall and on the side wall and on top of the elevation;
the trench accommodates at least a part of the second electrode; and
the second electrode does not substantially cover the material formed on top of the elevation;
wherein the material is formed in multiple spatially separated bands across the trench and the elevation.
7. The device of claim 6 , wherein:
the sensor is configured as a capacitive sensor;
the physical parameter is humidity; and
the material includes at least one of: a metal oxide, SiO 2 , SiC, a polyester, Polymethyl methacrylate, Benzocyclobutene, a polysulfate, cellulose acetate butyrate, porous silicon, and silicon nitride.
8. The device of claim 6 , comprising a transponder accommodating the sensor.
9. A device comprising a sensor for sensing a magnitude of a physical parameter of an environment of the sensor, wherein:
the sensor comprises a first electrode, a second electrode and a material between the first and second electrodes;
the material has an electrical property, whose value depends on the magnitude of the physical parameter;
the first electrode is formed in a first layer, and the second electrode is formed in a second layer different from the first layer;
the first layer has a trench and an elevation next to the trench;
the trench has a bottom wall and a side wall;
the material is positioned on the bottom wall and on the side wall and on top of the elevation;
the trench accommodates at least a part of the second electrode; and
the second electrode does not substantially cover the material formed on top of the elevation;
wherein the material on top of the elevation has one or more grooves or holes.
10. The device of claim 9 , wherein:
the sensor is configured as a capacitive sensor;
the physical parameter is humidity; and
the material includes at least one of: a metal oxide, SiO 2 , SiC, a polyester, Polymethyl methacrylate, Benzocyclobutene, a polysulfate, cellulose acetate butyrate, porous silicon, and silicon nitride.
11. The device of claim 9 , comprising a transponder accommodating the sensor.