Solid-state imaging device and method for manufacturing the same, and electronic apparatus and camera module
View Patent ↗A solid-state imaging device includes a photoelectric conversion portion, a charge-receiving portion to which charges are transferred from the photoelectric conversion portion, and a light control film having a reverse tapered opening over the photoelectric conversion portion to reduce the intensity of diffracted light diffusing to regions other than the photoelectric conversion portion.
1. A solid-state imaging device comprising:
a photoelectric conversion portion with a plurality of pixels with respective color components separated by color filters;
a charge-receiving portion to which charges are transferred from the photoelectric conversion portion; and
a light control film having reverse tapered openings over the photoelectric conversion portion, thereby reducing the intensity of diffracted light diffusing to regions other than the photoelectric conversion portion,
wherein,
a respective reverse tapered opening is provided for each pixel, and
the reverse tapered openings have different reverse taper angles according to the respective color components.
2. The solid-state imaging device according to claim 1 , wherein the light control film includes a light-shielding film.
3. The solid-state imaging device according to claim 1 , further comprising an optical waveguide over the photoelectric conversion portion, wherein the light control film is disposed at a lower end of the optical waveguide.
4. The solid-state imaging device according to claim 1 , wherein the reverse tapered opening has a shape having a plurality of steps.
5. The solid-state imaging device according to claim 1 , wherein the lower end of the reverse tapered opening has a smaller area than the photoelectric conversion portion.
6. An electronic apparatus comprising:
the solid-state imaging device as set forth in claim 1 ;
an optical system that guides incoming light to the photoelectric conversion portion of the solid-state imaging device; and
a signal processing circuit that processes a signal output from the solid-state imaging device.
7. A camera module comprising:
the solid-state imaging device as set forth in claim 1 ;
an optical system that guides incoming light to the photoelectric conversion portion of the solid-state imaging device; and
a signal processing circuit that processes a signal output from the solid-state imaging device.
8. A solid-state imaging device comprising:
a photoelectric conversion portion that generates a charge according to light incident thereon, the photoelectric conversion portion having a plurality of pixels with respective color components separated by color filters; and
a light-shielding film having a plurality of openings over the photoelectric conversion portion, each opening having a smaller area at one side of the light-shielding film through which light enters than at the other side,
wherein,
a respective reverse tapered opening is provided for each pixel, and
the reverse tapered openings have different reverse taper angles according to the respective color components.