IP Library Patent Application 13075998
Patent Application
App. No. 13/075,998

PHOTOVOLTAIC DEVICE BARRIER LAYER

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Patent No.
US None
App. No.
13/075,998
Abstract

A structure including a barrier layer adjacent to a substrate, a transparent conductive oxide layer adjacent to the barrier layer, and a buffer layer adjacent to the transparent conductive oxide layer. In the structure, the barrier layer includes a silicon aluminum oxide, the transparent conductive oxide layer includes cadmium and tin and the buffer layer comprises tin oxide. A photovoltaic device that includes the described structure along with a semiconductor window layer adjacent to the buffer layer and a semiconductor absorber layer adjacent to the semiconductor window layer. Methods of manufacturing a photovoltaic structure are also disclosed, as well as a sputter target for use in the manufacture of a photovoltaic device and methods of manufacturing the same.

Claims (48)

1 . A structure, comprising:

a barrier layer adjacent to a substrate, wherein the barrier layer comprises a silicon aluminum oxide;

a transparent conductive oxide layer adjacent to the barrier layer, wherein the transparent conductive oxide layer comprises cadmium and tin; and

a buffer layer adjacent to the transparent conductive oxide layer, wherein the buffer layer comprises tin oxide.

2 . The structure of claim 1 , wherein the substrate comprises a glass.

3 . The structure of claim 2 , wherein the glass is capable of transmitting more than about 50% of light having a wavelength in the range of 400 nm to 850 nm.

4 . The structure of claim 3 , wherein the glass is capable of transmitting more than about 70% of light having a wavelength in the range of 400 nm to 850 nm.

5 . The structure of claim 3 , wherein the glass is capable of transmitting more than about 85% of light having a wavelength in the range of 400 nm to 850 nm.

6 . The structure of claim 1 , wherein the glass comprises a substantially round edge.

7 . The structure of claim 1 , further comprising a second buffer layer between the transparent conductive oxide layer and the tin oxide buffer layer, wherein the second buffer layer comprises an oxide.

8 . The structure of claim 1 , wherein the barrier layer has a thickness of about 500 A to about 1500 A.

9 . The structure of claim 1 , wherein the barrier layer has a thickness of about 1000 A.

10 . The structure of claim 1 , wherein the transparent conductive oxide layer has a thickness of about 1000 A to about 4000 A.

11 . The structure of claim 10 , wherein the transparent conductive oxide layer has a thickness of about 2000 A to about 3000 A.

12 . The structure of claim 11 , wherein the transparent conductive oxide layer has a thickness of about 2600 A.

13 . The structure of claim 1 , wherein the buffer layer has a thickness of about 200 A to about 1500 A.

14 . The structure of claim 13 , wherein the buffer layer has a thickness of less than about 900 A.

15 . The structure of claim 1 , wherein the transparent conductive oxide layer comprises cadmium stannate.

16 . The structure of claim 1 , wherein the barrier layer, the transparent conductive oxide layer, and the buffer layer are annealed.

17 . The structure of claim 16 , further comprising cadmium sulfide-containing semiconductor window layer adjacent to the buffer layer a cadmium telluride-containing semiconductor absorber layer adjacent to the semiconductor window layer.

18 . A photovoltaic device, comprising:

a barrier layer adjacent to a substrate, wherein the barrier layer comprises silicon aluminum oxide;

a transparent conductive oxide layer adjacent to the barrier layer, wherein the transparent conductive oxide comprises cadmium stannate;

a buffer layer adjacent to the transparent conductive oxide layer, wherein the buffer layer comprises tin oxide;

a semiconductor window layer adjacent to the buffer layer and comprising cadmium sulfide; and

a semiconductor absorber layer adjacent to the semiconductor window layer and comprising cadmium telluride.

19 . The photovoltaic device of claim 18 , wherein the substrate comprises a glass.

20 . The photovoltaic device of claim 19 , wherein the glass comprises a reduced iron content.

21 . The photovoltaic device of claim 19 , wherein the glass has a transmittance of about 400 nm to about 850 nm.

22 . The photovoltaic device of claim 19 , wherein the transparent conductive oxide layer is annealed.

23 . The photovoltaic device of claim 22 , wherein the glass has a transmittance percentage of more than about 75%.

24 . The photovoltaic device of claim 23 , wherein the glass has a transmittance percentage of more than about 85%.

25 . The photovoltaic device of claim 19 , wherein one or more edges of the glass is substantially round.

26 . A method of manufacturing a photovoltaic structure comprising:

forming a barrier layer on a substrate, wherein the barrier layer comprises silicon aluminum oxide;

forming a transparent conductive oxide layer adjacent to the barrier layer, wherein the transparent conductive oxide layer comprises cadmium stannate;

forming buffer layer adjacent to the transparent conductive oxide layer, wherein the buffer layer comprises tin oxide; and

annealing the substrate to form an annealed transparent conductive oxide stack adjacent to the substrate.

27 . The method of claim 26 , further comprising forming a semiconductor window layer adjacent to the annealed transparent conductive oxide stack.

28 . The method of claim 27 , further comprising forming a semiconductor absorber layer adjacent to the semiconductor window layer.

29 . The method of claim 26 , wherein the step of forming the barrier layer comprises sputtering in an environment comprising argon and oxygen.

30 . The method of claim 26 , wherein the step of forming the transparent conductive oxide layer comprises sputtering in an environment comprising argon and oxygen.

31 . The method of claim 26 , wherein the step of forming the buffer layer comprises sputtering in an environment comprising oxygen.

32 . The method of claim 26 , further comprising rounding one or more edges of a glass, wherein the substrate comprises the glass.

33 . The method of claim 26 , wherein the annealing comprises heating the stack above about 400 degrees C.

34 . The method of claim 26 , wherein the annealing comprises heating the stack above about 500 degrees C.

35 . The method of claim 26 , wherein the annealing comprises heating the stack below about 600 degrees C.

36 - 49 . (canceled)

Assignments (3)
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENT RIGHTS Recorded Nov 15, 2021
From: JPMORGAN CHASE BANK, N.A.
To: FIRST SOLAR, INC.
Reel/Frame 058132/0261 →
CORRECTIVE ASSIGNMENT TO CORRECT THE PATENT APPLICATION 13/895113 ERRONEOUSLY ASSIGNED BY FIRST SOLAR, INC. TO JPMORGAN CHASE BANK, N.A. ON JULY 19, 2013 PREVIOUSLY RECORDED ON REEL 030832 FRAME 0088. ASSIGNOR(S) HEREBY CONFIRMS THE CORRECT PATENT APPLICATION TO BE ASSIGNED IS 13/633664. Recorded Sep 19, 2014
From: FIRST SOLAR, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 033779/0081 →
SECURITY AGREEMENT Recorded Jul 19, 2013
From: FIRST SOLAR, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 030832/0088 →