Disk handling apparatus and method for supporting a disk during material deposition at a deposition station
View Patent ↗A disk handling apparatus for supporting a disk during material deposition at a deposition station, comprising a disk vacuum paddle having a centrally disposed groove, and a vacuum source disposed within the groove, wherein the paddle contacts the disk only at disk corners on opposing major surfaces of the disk, and wherein the disk remains spaced from the groove at its outer diameter during material deposition.
1. A disk handling apparatus for supporting a disk during material deposition at a deposition station, comprising:
a disk vacuum paddle having a centrally disposed groove; and
a vacuum source disposed within the groove;
wherein the paddle contacts the disk only at disk corners on opposing major surfaces of the disk; and
wherein the disk remains spaced from the groove at its outer diameter during material deposition;
wherein a groove angle of the groove increases from a base of the groove to an upper portion of the groove such that the groove angle is 40 degrees with respect to the major surfaces of the disk at the base of the groove and the groove angle is 80 degrees with respect to the major surfaces of the disk at an upper portion of the groove.
2. The apparatus of claim 1 , wherein the paddle comprises a two-piece design including a top portion and a bottom portion.
3. The apparatus of claim 2 , wherein the top and bottom portions are separated to facilitate replacing the groove.
4. The apparatus of claim 2 , wherein the top and bottom portions are attached together using at least one guide pin and at least one locking screw.
5. The apparatus of claim 4 , further comprising an O-ring seal disposed between the top and bottom portions to prevent leakage.
6. The apparatus of claim 2 , wherein the top portion is formed of a different material than the bottom portion.
7. The apparatus of claim 2 , wherein the bottom portion comprises aluminum.
8. A method for supporting a disk during material deposition at a deposition station, comprising:
providing a disk vacuum paddle having a centrally disposed groove;
providing a vacuum source disposed within the groove;
inserting the disk within the disk paddle and proceeding with material deposition; and
contacting the disk with the disk paddle only at disk corners on opposing major surfaces of the disk;
wherein the disk remains spaced from the groove at its outer diameter during material deposition;
wherein a groove angle of the groove increases from a base of the groove to an upper portion of the groove such that the groove angle is 40 degrees with respect to the major surfaces of the disk at the base of the groove and the groove angle is 80 degrees with respect to the major surfaces of the disk at an upper portion of the groove.
9. The method of claim 8 , wherein the paddle comprises a two-piece design including a top portion and a bottom portion.
10. The method of claim 9 , wherein the top and bottom portions are separated to facilitate replacing the groove.
11. The method of claim 9 , wherein the top and bottom portions are attached together using at least one guide pin and at least one locking screw.
12. The method of claim 11 , wherein an O-ring seal is provided between the top and bottom portions to prevent leakage.
13. The method of claim 9 , wherein the top portion is formed of a different material than the bottom portion.
14. The method of claim 9 , wherein the bottom portion comprises aluminum.