ABRASIVE SLURRY FORMULATIONS CONTAINING NANO AND MICRO SPHERES ADDITIVES OR SELF-ASSEMBLED MONOLAYERS
This invention relates to methods for plate dressing using slurry charged with abrasives and soft polymeric or metallic micro-nano spheres additives to produce substantially uniform abrasive height. Additionally, methods for plate dressing using slurry charged with abrasives and self-assembled polymers to produce substantially uniform abrasive height are disclosed.
1 . An abrasive polishing slurry comprising:
a carrier fluid;
abrasive particles in the carrier fluid; and
micro-nano spheres in the carrier fluid.
2 . The abrasive polishing slurry of claim 1 wherein the micro-nano spheres are spherical shape.
3 . The abrasive polishing slurry of claim 1 wherein the micro-nano spheres are elliptical shape.
4 . The abrasive polishing slurry of claim 1 wherein the micro-nano spheres the abrasive particles are diamond abrasives.
5 . The abrasive polishing slurry of claim 1 wherein the micro-nano spheres are polymeric.
6 . The abrasive polishing slurry of claim 5 wherein the micro-nano spheres are hollow.
7 . The abrasive polishing slurry of claim 5 wherein the micro-nano spheres are metallic.
8 . The abrasive polishing slurry of claim 5 wherein the diameter of the micro-nano spheres of the soft polymeric ranges between 50 nanometers to 100 micrometers.
9 . The abrasive polishing slurry of claim 1 wherein the micro-nano spheres are chemically coated.
10 . The abrasive polishing slurry of claim 1 wherein the abrasive particles are mechanically dispersed.
11 . The abrasive polishing slurry of claim 1 wherein the carrier fluid is oil based.
12 . The abrasive polishing slurry of claim 1 wherein the carrier fluid is water based.
13 . A method of formulating a lapping slurry that includes abrasive particles in a and micro-nano spheres in a carrier fluid, the method comprising:
combining abrasive particless with liquid ingredients to form a mixture;
adding the micro-nano spheres to the slurry; and
stirring the slurry mixture.
14 . A lapping slurry comprising:
a self assembled carrier fluid;
abrasive particles in the self assembled carrier fluid; and
micro-nano spheres in the self assembled carrier fluid.
15 . An abrasive article for polishing a surface, the abrasive article comprises:
a backing material; and
abrasive particles, micro-nano spheres and a binder, abrasive particles and micro-nano spheres dispersed in the binder forming an abrasive composite.
16 . The abrasive article for polishing a surface wherein abrasive composite of claim 15 is shaped.
17 . The abrasive article for polishing a surface of claim 15 wherein the binder is water dissolvable.
18 . The abrasive article for polishing a surface of claim 15 wherein the binder is oil dissolvable.