Organic light-emitting display device and method of manufacturing the same
View Patent ↗An organic light-emitting display device includes an active layer of a thin film transistor arranged on a substrate, a first insulating layer and a gate electrode arranged on the active layer, the gate electrode including a first transparent conductive layer and a first metal layer, a second insulating layer arranged on the gate electrode and including a plurality of contact holes that expose a source region and a drain region of the active layer, a reflective layer and a second transparent conductive layer arranged within the contact holes, a source electrode and a drain electrode arranged on the second transparent conductive layer and on the second insulating layer, the source electrode and the drain electrode each including a second metal layer, a pixel electrode arranged on the first insulating layer, the pixel electrode including the first transparent conductive layer, the reflective layer, and the second transparent conductive layer, an intermediate layer arranged on the pixel electrode and including an organic emission layer and an opposite electrode facing the pixel electrode, wherein the intermediate layer is arranged between the pixel electrode and the opposite electrode.
1. An organic light-emitting display device, comprising:
an active layer of a thin film transistor arranged on a substrate;
a first insulating layer and a gate electrode arranged on the active layer, the gate electrode including a first transparent conductive layer and a first metal layer;
a second insulating layer arranged on the gate electrode and including a plurality of contact holes that expose a source region and a drain region of the active layer;
a reflective layer and a second transparent conductive layer arranged within the contact holes;
a source electrode and a drain electrode arranged on the second transparent conductive layer and on the second insulating layer, the source electrode and the drain electrode each including a second metal layer;
a pixel electrode arranged on the first insulating layer, the pixel electrode including the first transparent conductive layer, the reflective layer, and the second transparent conductive layer;
an intermediate layer arranged on the pixel electrode and including an organic emission layer; and
an opposite electrode facing the pixel electrode, wherein the intermediate layer is arranged between the pixel electrode and the opposite electrode.
2. The organic light-emitting display device of claim 1 , wherein the reflective layer comprises silver (Ag).
3. The organic light-emitting display device of claim 1 , wherein the first transparent conductive layer and the second transparent conductive layer each comprise at least one material selected from a group consisting of indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In2O3), indium gallium oxide (IGO), and aluminum zinc oxide (AZO).
4. The organic light-emitting display device of claim 1 , wherein the first metal layer and the second metal layer each comprise a plurality of metal layers.
5. The organic light-emitting display device of claim 1 , wherein the first metal layer and the second metal layer are comprised of a same material.
6. The organic light-emitting display device of claim 1 , wherein the first metal layer and the second metal layer each comprise aluminum (Al).
7. The organic light-emitting display device of claim 1 , wherein an end portion of the first transparent conductive layer of the pixel electrode, and end portions of the reflective layer and the second transparent conductive layer have different etching surfaces from each other.
8. The organic light-emitting display device of claim 1 , wherein the first metal layer is arranged on an upper portion of the first transparent conductive layer of the pixel electrode, on a side surface of the reflective layer, and on a lower portion of the second insulating layer.
9. The organic light-emitting display device of claim 8 , wherein the first metal layer is connected to one of the source electrode and the drain electrode via a via-hole that is arranged in the second insulating layer.
10. The organic light-emitting display device of claim 9 , wherein the reflective layer and the second transparent conductive layer are arranged within the via-hole.
11. The organic light-emitting display device of claim 1 , further comprising a capacitor including:
a first electrode that includes a same material as that of the active layer and is arranged on a same layer as the active layer; and
a second electrode including the first transparent conductive layer, the first insulating layer being arranged between the first electrode and the second electrode.
12. The organic light-emitting display device of claim 11 , wherein the second electrode of the capacitor further comprises the reflective layer and the second transparent conductive layer on the first transparent conductive layer.
13. The organic light-emitting display device of claim 1 , wherein the pixel electrode is a transflective mirror that partially transmits and partially reflects light emitted from the organic emission layer.
14. The organic light-emitting display device of claim 1 , wherein the opposite electrode is a reflecting mirror that reflects light emitted from the organic emission layer.
15. The organic light-emitting display device of claim 1 , further comprising a pixel defining layer surrounding edges of the pixel electrode and covering the source and drain electrodes.
16. A method of manufacturing an organic light-emitting display device, comprising:
forming a semiconductor layer on a substrate;
forming an active layer of a thin film transistor by patterning the semiconductor layer;
forming a first insulating layer, a first transparent conductive layer, and a first metal layer on the active layer;
forming a base layer of a pixel electrode and a gate electrode of the thin film transistor by patterning the first transparent conductive layer and the first metal layer;
forming a second insulating layer and a photoresist layer on the base layer of the pixel electrode and on the gate electrode;
forming a first opening exposing the first transparent conductive layer of the pixel electrode while forming contact holes exposing source and drain regions of the active layer of the thin film transistor by patterning the second insulating layer and the photoresist layer;
forming a reflective layer and a second transparent conductive layer in the first opening, in the contact holes, and on the photoresist layer that remains on the second insulating layer after the first opening and the contact holes are formed;
removing the photoresist layer;
forming a second metal layer in the first opening and in the contact holes; and
forming a source electrode and a drain electrode by patterning the second metal layer.
17. The method of claim 16 , further comprising forming the source and drain regions in the active layer after the forming of the gate electrode by doping the active layer with ion impurities while using the gate electrode as a mask.
18. The method of claim 16 , wherein the forming of the first opening and the contact holes comprises:
forming the first opening and the contact holes in the second insulating layer by a first etching process; and
removing the first metal layer on the base layer of the pixel electrode exposed by the first opening by a second etching process.
19. The method of claim 16 , further comprising forming a via-hole in the first metal layer and in the second insulating layer on the base layer when the first opening and the contact holes are formed.
20. The method of claim 19 , wherein the reflective layer and the second transparent conductive layer are arranged within the via-hole.
21. The method of claim 19 , wherein the source and drain electrodes are simultaneously formed and are arranged within the contact holes and within the via-hole.
22. The method of claim 16 , further comprising:
exposing upper layers of the pixel electrode; and
forming a third insulating layer covering the source and drain electrodes after forming the source and drain electrodes.
23. The method of claim 22 , wherein the third insulating layer is produced by a mask process.
24. The method of claim 16 , wherein a first electrode of a capacitor is comprised of a same material as the active layer and is arranged on a same layer as the active layer and is formed when the active layer is formed, and a second electrode of the capacitor is comprised of the first transparent conductive layer and is formed when the gate electrode is formed.
25. The method of claim 24 , wherein the reflective layer, the second transparent conductive layer, and the second metal layer are further arranged on the first transparent conductive layer of the capacitor.