Method of manufacturing display device and display device
View Patent ↗A method of manufacturing a display device includes the steps of: forming a positive type photoresist above a surface of a first transparent substrate having a transistor formed on the surface thereof so as to cover the transistor; radiating a light from a back surface side of the first transparent substrate to the first transparent substrate having the positive type photoresist formed thereabove, for exposing the positive type photoresist; developing the positive type photoresist thus exposed to selectively leave the positive type photoresist located above the transistor, for forming a spacer; and laminating a second transparent substrate above the surface of the first transparent substrate through the spacer.
1. A method of manufacturing a display device, comprising the steps of:
forming a positive type photoresist above a surface of a first transparent substrate that has a transistor formed on the surface, the transistor having a source electrode, a gate electrode, and a drain electrode;
radiating light to the first transparent substrate having the positive type photoresist formed thereabove from a back surface side of the first transparent substrate to expose the positive type photoresist, the positive type photoresist being selectively exposed by using the source electrode, the gate electrode, and the drain electrode of the transistor as a mask;
developing the exposed positive type photoresist to selectively leave portions of the positive type photoresist located above the source, gate, and drain electrodes of the transistor so as to form spacers disposed respectively above the source, gate, and drain electrodes; and
laminating a second transparent substrate above the first transparent substrate through the spacers so that a space is formed between the first transparent substrate and the second transparent substrate.
2. The method of claim 1 , further comprising the step of radiating light to said first transparent substrate having the positive type photoresist formed thereabove from the side of the surface on which the transistor is formed through a separate mask so as to further selectively expose the positive type photoresist.
3. The method of manufacturing a display device according to claim 2 , wherein:
a light blocking pattern having a light blocking property is formed on the surface of the first transparent substrate,
the positive type photoresist is formed over the transistor and the light blocking pattern, and
the exposed positive type photoresist is developed to selectively leave the portions of the positive type photoresist respectively located above the source, gate, and drain electrodes of the transistor and a portion of the positive type photoresist located above light blocking pattern to form the spacers and an oriented nuclear.
4. The method of claim 3 , further comprising step of subjecting the portion of the positive type photoresist located above the light blocking pattern to half exposure.
5. The method of claim 1 , wherein a liquid crystal layer is formed between the first transparent substrate and the second transparent substrate so as to surround the spacers.
6. The method of claim 1 , wherein the transistor has a metallic pattern having a light blocking property.
7. The method of claim 1 , wherein a color filter is formed above the first transparent substrate, and the second transparent substrate is laminated above the first transparent substrate in such a way that the first transparent substrate and the second transparent substrate face each other.
8. The method of claim 1 , wherein a width of each of the spacers is made to be smaller than a width of a respective electrode over which the spacer is located by increasing an exposure amount.