Method and apparatus for depositing LED organic film
The disclosure relates to a method for depositing an organic film layer on a substrate. In one implementation a method to deposit organic film by generating vaporized organic particles; streaming a carrier fluid proximal to a source to carry the vaporized organic particles and solid organic particles from the source towards the substrate; transporting the vaporized and solid organic particles through a discharge nozzle with a plurality of micro-pore openings, placed between the source and the substrate, that permits the passage of at least a portion of the vaporized or solid organic particles through the micro-pores; depositing the vaporized organic particles and the solid organic particles that are transported through the discharge nozzle onto the substrate.
1. A method for depositing a layer of substantially solvent-free organic material on a substrate, comprising:
generating vaporized organic particles;
streaming a carrier fluid proximal to a source to carry the vaporized organic particles and solid organic particles from the source towards the substrate;
transporting the vaporized and solid organic particles through a discharge nozzle with a plurality of micro-pore openings, placed between the source and the substrate, that permits the passage of at least a portion of the vaporized or solid organic particles through the micro-pores;
depositing the vaporized organic particles and the solid organic particles that are transported through the discharge nozzle onto the substrate to form a substantially solvent-free organic layer on the substrate.
2. The method of claim 1 , wherein the step of generating the vaporized organic particles further comprises heating the source of organic material.
3. The method of claim 2 , wherein the source is heated to a temperature of at least about 100° C.
4. The method of claim 1 , wherein the step of streaming the carrier fluid proximal to the source further comprises heating the carrier fluid.
5. The method of claim 1 , wherein transporting the organic particles through the micro-pores further comprises heating the discharge nozzle.
6. The method of claim 1 , further comprising lodging and dislodging at least one solid organic particle at least one micro-pore.
7. The method of claim 1 , further comprising pulsatingly heating the plurality of micro-pores to permit the passage of at least a portion of the vaporized or solid organic particles through the micro-pores.