Package tolerate design and method
An improved MEMS transducer apparatus and method. The apparatus has a movable base structure including an outer surface region and an inner surface region. At least one central anchor structure can be spatially disposed within a vicinity of the inner surface region and at least one peripheral anchor structure can be spatially disposed within a vicinity of the outer surface region. Additionally, the apparatus can have at least one peripheral spring structure. The peripheral spring structure(s) can be coupled to the peripheral anchor structure(s) and at least one portion of the outer surface region. The apparatus can also have at least one central spring structure. The central spring structure(s) can be operably coupled to the central anchor structure(s) and at least one portion of the inner surface region.
1. An apparatus comprising:
a movable base structure comprising an outer surface region and an inner surface region;
at least one capacitor element, the at least one capacitor element being spatially disposed adjacent to at least one portion of the movable base structure, wherein the at least one capacitor element is spatially disposed between the outer surface region and the inner surface region;
at least one central anchor structure spatially disposed within a vicinity of the inner surface region of the movable base structure;
at least one peripheral anchor structure spatially disposed within a vicinity of the outer surface region of the movable base structure; and
at least one central spring structure, the at least one central spring structure being operably coupled to the at least one peripheral anchor structure and at least one portion of the inner surface region, wherein the at least one central spring structure is proportional to the number of the at least one capacitor element.
2. The apparatus of claim 1 wherein the movable base structure is a rectangular movable base structure.
3. The apparatus of claim 2 wherein the at least one peripheral anchor structure is spatially disposed within a vicinity of the outer surface region near the corners of the rectangular movable base structure.
4. The apparatus of claim 3 wherein the at least one central anchor structure is spatially disposed near the center of the rectangular movable base structure.
5. The apparatus of claim 1 wherein the apparatus is operably coupled to a MEMS device or an electronic device.
6. The apparatus of claim 5 configured to be tolerant of external deformations.
7. An apparatus comprising:
a rectangular movable base structure comprising an outer surface region and an inner surface region;
at least two central anchor structures spatially disposed within a vicinity of the inner surface region of the movable base structure, the at least two central anchor structures configured symmetrically;
at least two peripheral spring structures, the at least two peripheral spring structures being operably coupled to the at least two peripheral anchor structures and at least one portion of the outer surface region, the at least two peripheral spring structures configured symmetrically; and
at least two central spring structures, the at least two central spring structures being operably coupled to the at least two peripheral anchor structures and at least one portion of the inner surface region, the at least two central spring structures configured symmetrically.
8. The apparatus of claim 7 further comprising a plurality of capacitor elements, the capacitor elements being spatially disposed within the rectangular movable base structure between the inner surface region and outer surface region.
9. The apparatus of claim 8 configured to be tolerant of external deformations.