Organic light emitting display device and method for manufacturing the same
In an organic light emitting diode (OLED) display and a manufacturing method, an organic light emitting diode (OLED) display includes: a substrate; a semiconductor layer pattern formed on the substrate and including a first capacitor electrode; a gate insulating layer covering the semiconductor layer pattern; a first conductive layer pattern formed on the gate insulating layer and including a second capacitor electrode having at least a portion overlapping the first capacitor electrode; an interlayer insulating layer having a capacitor opening exposing a portion of the second capacitor electrode and covering the second capacitor electrode; and a second conductive layer pattern formed on the interlayer insulating layer, wherein the capacitor opening includes a first transverse side wall parallel to and overlapping the second capacitor electrode, a second transverse side wall parallel to and not overlapping the second capacitor electrode, and a longitudinal side wall connecting the first transverse side wall and the second transverse side wall to each other and overlapping the first capacitor electrode.
1. An organic light emitting diode (OLED) display comprising:
a substrate;
a semiconductor layer pattern formed on the substrate and including a first capacitor electrode;
a gate insulating layer covering the semiconductor layer pattern;
a first conductive layer pattern formed on the gate insulating layer and including a second capacitor electrode having at least a portion overlapping the first capacitor electrode;
an interlayer insulating layer including a capacitor opening exposing a portion of the second capacitor electrode and at least one doping hole overlapping the second capacitor electrode and the first capacitor electrode and exposing a portion of the second capacitor electrode near the capacitor opening, and covering the second capacitor electrode; and
a second conductive layer pattern formed on the interlayer insulating layer.
2. The organic light emitting diode (OLED) display of claim 1 , wherein the first capacitor electrode overlapped by at least one doping hole is a semiconductor layer doped with an impurity.
3. The organic light emitting diode (OLED) display of claim 1 , wherein a portion of a region of the first conductive layer pattern is formed of a single transparent conductive layer, and another portion of the region is formed of a transparent conductive layer and a plurality of metal layers deposited on the transparent conductive layer.
4. The organic light emitting diode (OLED) display of claim 3 , wherein the capacitor opening is formed through an etching process, and the etching process includes a cleaning process using a solution including hydrofluoric acid (HF).
5. The organic light emitting diode (OLED) display of claim 4 , wherein at least one metal layer among the plurality of metal layers except for the highest layer is relatively more easily eroded by the hydrofluoric acid solution than the highest layer.
6. The organic light emitting diode (OLED) display of claim 4 , wherein at least one metal layer among the plurality of metal layers except for the highest layer includes aluminum.
7. The organic light emitting diode (OLED) display of claim 3 , wherein at least a portion of the second capacitor electrode of the first conductive layer pattern exposed through the capacitor opening is formed of a single transparent conductive layer.
8. The organic light emitting diode (OLED) display of claim 7 , wherein the first capacitor electrode overlapped by the second capacitor electrode formed of the single transparent conductive layer is doped with an impurity.
9. An organic light emitting diode (OLED) display comprising:
a substrate;
a semiconductor layer pattern formed on the substrate and including a first capacitor electrode;
a gate insulating layer covering the semiconductor layer pattern;
a first conductive layer pattern formed on the gate insulating layer and including a second capacitor electrode having at least a portion overlapping the first capacitor electrode;
an interlayer insulating layer having a capacitor opening exposing the portion of the second capacitor electrode and covering the second capacitor electrode, the interlayer insulating layer including least one doping hole overlapping the second capacitor electrode and the first capacitor electrode and exposing a portion of the second capacitor electrode near the capacitor opening; and
a second conductive layer pattern formed on the interlayer insulating layer,
the capacitor opening including a first transverse side wall parallel to and overlapping the second capacitor electrode, a second transverse side wall parallel to and not overlapping the second capacitor electrode nor the first capacitor electrode, and a longitudinal side wall connecting the first transverse side wall and the second transverse side wall to each other and overlapping the first capacitor electrode.
10. The organic light emitting diode (OLED) display of claim 9 , the first capacitor electrode overlapped by the longitudinal side wall of the capacitor opening being a semiconductor layer doped with an impurity via the doping hole.
11. The organic light emitting diode (OLED) display of claim 10 , the first capacitor ele ctrode having a region not doped with an impurity.