Apparatus for manufacturing vitreous silica crucible
During fabrication of a vitreous silica crucible, contamination of the vitreous silica crucible due to wear particles and debris of components of an apparatus for manufacturing a vitreous silica crucible is reduced by preventing damage and wear of the components of the apparatus due to silica fume. The apparatus for manufacturing a vitreous silica crucible is divided into a lower section for accommodating a mold and a mold driving system and an upper section for accommodating an arc electrode driving system, wherein a sectioning member including one or more communication paths for allowing penetration of arc electrodes, thereby the air flow is controlled so as to reduce exchange between gas in the upper section and gas in the lower section.
1. An apparatus for manufacturing a vitreous silica crucible, comprising:
a mold having an inner surface having a bottom and a cylindrical shape;
a mold driving unit for rotating the mold;
at least two arc electrodes for generating an arc discharge; and
an electrode driving unit for driving the arc electrodes, and fusing and vitrifying a powder molded body formed of silica powder deposited on the inner surface of the mold through a discharge by the arc electrodes, the apparatus further comprising:
a lower section for accommodating the mold;
an upper section for accommodating the electrode driving unit; and
a sectioning member for isolating the upper section and the lower section, the sectioning member having at least one communication path, wherein the communication path is structured for allowing penetration of the arc electrodes; and
an air flow controlling unit for controlling air flow in the communication path such that exchange between gas inside the upper section and gas inside the lower section is suppressed,
wherein the sectioning member comprises first and second barrier walls having space therebetween, the space being disposed to separate the upper section and the lower section,
the communication path is provided in the first and second barrier walls, and
the air flow controlling unit comprises an exhaust device for exhausting gas in the space between the first barrier wall and the second barrier wall and an air supply device for supplying gas to the space between the first barrier wall and the second barrier wall.
2. The apparatus of claim 1 , wherein the air flow controlling unit comprises an exhaust device capable of exhausting gas inside the communication path.
3. The apparatus of claim 1 , wherein the air flow controlling unit comprises an air supply device capable of supplying gas into the communication path.
4. The apparatus of claim 1 , wherein the air flow controlling unit comprises an exhaust device for exhausting gas from the lower section.
5. The apparatus of claim 1 , wherein the air flow controlling unit comprises an air supply device for supplying gas to the lower section.