IP Library Granted Patent US 8,573,057
Granted Patent B2
US 8,573,057 · App. 13/096,450 · Granted Nov 5, 2013

Sensor mount vibration reduction

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Quick Facts
Patent No.
US 8,573,057
App. No.
13/096,450
Granted
Nov 5, 2013
Kind
B2
Abstract

Techniques are provided for reducing mount vibration in an inertial rate sensor (IRS). For example, if oscillation in an IRS's vibratory members, vibrating along a first axis, cause displacement in the IRS's mount along a second axis, the vibratory members can be aligned so that the vibratory members have some component of movement along the second axis during oscillation. This component of movement can help reduce the displacement of the IRS's mount along the second axis. It can further reduce sensitivity to changes in the boundary conditions of an IRS (e.g., vibrations and other movements at the mount from forces external to the IRS). Vibratory members further can have portions of increased mass at the vibratory members' tips, which can impact the alignment of the vibratory members. These examples, however, are not exhaustive.

Claims (36)

1. An inertial rate sensor comprising:

a base; and

a plurality of vibratory members coupled with the base and positioned symmetrically about an axis of symmetry, wherein each vibratory member includes:

an elongate dimension extending outward from the base to a tip of the vibratory member; and

an axis of motion along which the vibratory member is configured to move when driven in oscillation, the axis of motion being perpendicular to the elongate dimension;

wherein the elongate dimension of each vibratory member is angled from the axis of symmetry such that each vibratory member, when driven in oscillation, includes a component of motion parallel to the axis of symmetry.

2. The inertial rate sensor as recited in claim 1 , wherein each vibratory member is tapered such that a lateral dimension of each vibratory member decreases from the base to the tip of the vibratory member.

3. The inertial rate sensor as recited in claim 1 , wherein the base and the plurality of vibratory members comprise a piezoelectric material.

4. The inertial rate sensor as recited in claim 1 , wherein each of the plurality of vibratory members includes a portion of increased mass at the tip of the vibratory member.

5. The inertial rate sensor as recited in claim 4 , wherein, for each of the plurality of vibratory members, the portion of increased mass is symmetric about an axis parallel to the elongate dimension of the vibratory member.

6. The inertial rate sensor as recited in claim 4 , wherein, for each of the plurality of vibratory members, the portion of increased mass is symmetric about an axis parallel to the axis of symmetry.

7. A tuning fork for use in an inertial rate sensor, the tuning fork comprising:

a base having a mounting area; and

two vibratory members coupled with the base and positioned symmetrically on opposite sides of an axis of symmetry, each vibratory member including:

an elongate dimension extending outward from the base to a tip of the vibratory member; and

an axis of motion along which the vibratory member is configured to move when driven in oscillation, the axis of motion being perpendicular to the elongate dimension and substantially coplanar with the axis of symmetry and the elongate dimension;

wherein the elongate dimension of each vibratory member is angled from the axis of symmetry such that each vibratory member, when driven in oscillation, includes a component of motion parallel to the axis of symmetry.

8. The tuning fork as recited in claim 7 , wherein each vibratory member is tapered such that a lateral dimension of each vibratory member decreases from the base to the tip of the vibratory member.

9. The tuning fork as recited in claim 7 , wherein the base and the plurality of vibratory members comprise a piezoelectric material.

10. The tuning fork as recited in claim 7 , wherein each of the plurality of vibratory members includes a portion of increased mass at the tip of the vibratory member.

11. The tuning fork as recited in claim 10 , wherein, for each of the plurality of vibratory members, the portion of increased mass is symmetric about an axis parallel to the elongate dimension of the vibratory member.

12. The tuning fork as recited in claim 10 , wherein, for each of the plurality of vibratory members, the portion of increased mass is symmetric about an axis parallel to the axis of symmetry.

13. The tuning fork as recited in claim 10 , wherein an angle between the elongate dimension of each vibratory member and the axis of symmetry is within a range of 1 to 3 degrees.

14. The tuning fork as recited in claim 10 , wherein an angle between the elongate dimension of each vibratory member and the axis of symmetry is configured to reduce vibrations at the mounting area when the two vibratory members are driven in oscillation.

15. The tuning fork as recited in claim 10 , further comprising a plurality of sense members coupled with the base, the sense members configured to detect rotation about a sensitive axis when the two vibratory members are driven in oscillation.

16. A structure for use in the inertial rate sensor, the structure comprising:

a body of piezoelectric material, the body including a base and a plurality of vibratory members, wherein:

the plurality of vibratory members are coupled with the base and positioned symmetrically about an axis of symmetry, each vibratory member including:

an elongate dimension extending outward from the base to a tip of the vibratory member;

a portion of increased mass at the tip of the vibratory member; and

an axis of motion along which the vibratory member is configured to move when driven in oscillation, the axis of motion being perpendicular to the elongate dimension and substantially coplanar with the axis of symmetry and the elongate dimension; and

the elongate dimension of each vibratory member is angled from the axis of symmetry such that the vibratory member, when driven in oscillation, includes a component of motion along the axis of symmetry.

17. The structure for use in the inertial rate sensor as recited in claim 16 , wherein, for each of the plurality of vibratory members, the portion of increased mass is symmetric about an axis parallel to the elongate dimension of the vibratory member.

18. The structure for use in the inertial rate sensor as recited in claim 16 , wherein, for each of the plurality of vibratory members, the portion of increased mass is symmetric about an axis parallel to the axis of symmetry.

19. The structure for use in the inertial rate sensor as recited in claim 16 , further comprising a plurality of sense members coupled with the body, the sense members configured to detect rotation about a sensitive axis when the plurality of vibratory members are driven in oscillation.

20. The structure for use in the inertial rate sensor as recited in claim 16 , wherein each vibratory member is tapered such that a lateral dimension of each vibratory member decreases from the base to the tip of the vibratory member.

Assignments (11)
SECURITY INTEREST Recorded Jun 5, 2025
From: EMCORE LLC (F/K/A EMCORE CORPORATION); CARTRIDGE ACTUATED DEVICES, INC.
To: CRYSTAL FINANCIAL LLC D/B/A SLR CREDIT SOLUTIONS, AS ADMINISTRATIVE AGENT
Reel/Frame 071520/0457 →
ENTITY CONVERSION Recorded May 22, 2025
From: EMCORE CORPORATION
To: EMCORE LLC
Reel/Frame 071352/0537 →
SECURITY INTEREST Recorded Aug 23, 2022
From: EMCORE CORPORATION
To: WINGSPIRE CAPITAL LLC
Reel/Frame 061300/0129 →
CORRECTIVE ASSIGNMENT TO CORRECT THE THE ASSIGNEE NAME PREVIOUSLY RECORDED AT REEL: 058848 FRAME: 0511. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Feb 11, 2022
From: SYSTRON DONNER INERTIAL, INC.
To: EMCORE CORPORATION
Reel/Frame 059038/0635 →
MERGER Recorded Feb 1, 2022
From: SYSTRON DONNER INERTIAL, INC.
To: EMCOR CORPORATION
Reel/Frame 058848/0511 →
CORRECTIVE ASSIGNMENT TO CORRECT THE PROPERTY NUMBERS PREVIOUSLY RECORDED AT REEL: 037927 FRAME: 0605. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Nov 13, 2018
From: BEI NORTH AMERICA LLC; CRYDOM, INC.; CUSTOM SENSORS & TECHNOLOGIES, INC.; KAVLICO CORPORATION
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 047511/0477 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 6, 2017
From: CUSTOM SENSORS & TECHNOLOGIES, INC.
To: SYSTRON DONNER INERTIAL, INC.
Reel/Frame 040874/0670 →
SECURITY INTEREST Recorded Feb 25, 2016
From: BEI NORTH AMERICA LLC; CRYDOM, INC.; CUSTOM SENSORS & TECHNOLOGIES, INC.; KAVLICO CORPORATION
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037927/0605 →
RELEASE OF SECURITY INTEREST Recorded Dec 2, 2015
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: BEI SENSORS & SYSTEMS COMPANY, INC.; CUSTOM SENSORS & TECHNOLOGIES, INC.; CRYDOM, INC.; BEI TECHNOLOGIES, INC.; KAVLICO CORPORATION
Reel/Frame 037196/0174 →
SECURITY AGREEMENT Recorded Oct 3, 2014
From: BEI SENSORS & SYSTEMS COMPANY, INC.; CUSTOM SENSORS & TECHNOLOGIES, INC; CRYDOM, INC.; BEI TECHNOLOGIES, INC.; KAVLICO CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 033888/0700 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 28, 2011
From: MOORE, ROBERT H.
To: CUSTOM SENSORS & TECHNOLOGIES, INC.
Reel/Frame 026195/0102 →