Method of fabricating high-resolution features
View Patent ↗A method of forming a high resolution feature on a substrate, the method includes, depositing a liquid composition comprising a substance and a solvent onto the substrate to form deposited features, heating the deposited features to a heating temperature during or after the depositing to form an intermediate feature having a central region and an edge region, applying an adhesive substance to at least a portion of a surface of the intermediate feature, and removing the adhesive substance together with at least a portion of the central region of the intermediate feature to form the high resolution feature on the substrate.
1. A method of forming a high resolution feature on a substrate, the method comprising:
depositing a liquid composition comprising a substance and a solvent onto the substrate to form a planar deposited feature,
heating the planar deposited feature to a heating temperature during or after the depositing to form a planar intermediate feature having a central region and an edge region, wherein the solvent of the liquid composition has a boiling point that is 100° C. or more higher than the heating temperature, and wherein the planar intermediate feature comprises a residual amount of the solvent in the central region,
applying an adhesive substance to at least a portion of the central region of the planar intermediate feature, and
removing the adhesive substance together with the central region of the planar intermediate feature, leaving the edge region of the planar intermediate feature on the substrate so as to form the high resolution feature on the substrate.
2. The method of claim 1 , wherein the substance is metal nanoparticles selected from the group consisting of silver, gold, platinum, palladium, copper, cobalt, zinc, indium, tin, chromium, nickel, silver-copper composite, silver-gold-copper composite, silver-palladium composite, silver-gold-palladium composite and mixtures thereof.
3. The method of claim 2 , wherein the metal nanoparticles further comprise a stabilizer having a formula of X—Y,
wherein X is a hydrocarbon group comprising from about 4 carbon atoms to about 24 carbon atoms, and
wherein Y is a functional group attached to a surface of the metal nanoparticle and being selected from the group consisting of hydroxyl, amine, carboxylic acid, thiol and its derivatives, xanthic acid, pyridine, pyrrolidone, carbamate and mixtures thereof.
4. The method of claim 3 , wherein the metal nanoparticles are silver nanoparticles and the stabilizer is an organoamine stabilizer selected from the group consisting butylamine, pentylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, hexadecylamine, undecylamine, dodecylamine, tridecylamine, tetradecylamine, diaminopentane, diaminohexane, diaminoheptane, diaminooctane, diaminononane, diaminodecane, diaminooctane, dipropylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, methylpropylamine, ethylpropylamine, propylbutylamine, ethylbutylamine, ethylpentylamine, propylpentylamine, butylpentylamine, tributylamine, trihexylamine and mixtures thereof.
5. The method of claim 1 , wherein the solvent is selected from the group consisting of dodecylbenzene, decalin, tetrahydronaphthalene, bi-cyclohexane, isoparaffinic hydrocarbons, hexalin, a cyclic terpene, a cyclic terpinene, 1-phenyl-1-cyclohexene, 1-tert-butyl-1-cyclohexene, terpinolene, γ-terpinene, α-terpinene, α-pinene, terpineol, methyl naphthalene and mixtures thereof.
6. The method of claim 1 , wherein the depositing is conducted by inkjet printing.
7. The method of claim 1 , wherein the planar deposited feature is heated to a temperature of 150° C. or less.
8. The method of claim 1 , wherein the planar intermediate feature has a width of at least 30 microns.
9. The method of claim 1 , wherein the high resolution feature has a width of less than about 10 microns.
10. The method of claim 1 , wherein the liquid composition further includes a second solvent, and wherein the boiling point of the solvent is at least 50° C. higher than a boiling point of the second solvent.
11. The method of claim 1 , wherein the adhesive substance is applied to an entire surface of the planar intermediate feature, such that the adhesive substance contacts the central region and the edge region of the planar intermediate feature, but removal of the adhesive substance does not remove the edge region from the substrate.
12. A method of forming a high resolution feature on a substrate, the method comprising:
depositing a liquid composition comprising metal nanoparticles and a solvent onto the substrate to form a planar deposited feature,
annealing the planar deposited feature by heating the planar deposited feature to a heating temperature during or after the depositing and thereby forming a planar intermediate feature having a central region and an edge region, wherein the solvent of the liquid composition has a boiling point that is 100° C. or more higher than the heating temperature, and wherein the planar intermediate feature comprises a residual amount of the solvent in the central region,
applying an adhesive substance to at least a portion of the central region of the planar intermediate feature, and
removing the adhesive substance together with the central region of the planar intermediate feature, leaving the edge region of the planar intermediate feature on the substrate so as to form the high resolution feature on the substrate.
13. The method of claim 12 , wherein the adhesive substance is applied to an entire surface of the planar intermediate feature, such that the adhesive substance contacts the central region and the edge region of the planar intermediate feature, but removal of the adhesive substance does not remove the edge region from the substrate.
14. The method of claim 12 , wherein the metal nanoparticles are selected from the group consisting of silver, silver-copper composite, silver-gold-copper composite, silver-palladium composite, silver-gold-palladium composite and mixtures thereof.
15. The method of claim 12 , wherein the metal nanoparticles further comprise a stabilizer having a formula of X—Y,
wherein X is a hydrocarbon group comprising from about 4 carbon atoms to about 24 carbon atoms, and
wherein Y is a functional group attached to a surface of the metal nanoparticle and being selected from the group consisting of hydroxyl, amine, carboxylic acid, thiol and its derivatives, xanthic acid, pyridine, pyrrolidone, carbamate and mixtures thereof.
16. The method of claim 15 , wherein the metal nanoparticles are silver nanoparticles and the stabilizer is an organoamine stabilizer selected from the group consisting butylamine, pentylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, hexadecylamine, undecylamine, dodecylamine, tridecylamine, tetradecylamine, diaminopentane, diaminohexane, diaminoheptane, diaminooctane, diaminononane, diaminodecane, diaminooctane, dipropylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, methylpropylamine, ethylpropylamine, propylbutylamine, ethylbutylamine, ethylpentylamine, propylpentylamine, butylpentylamine, tributylamine, trihexylamine and mixtures thereof.
17. The method of claim 12 , wherein the solvent is selected from the group consisting of dodecylbenzene, decalin, tetrahydronaphthalene, bi-cyclohexane, isoparaffinic hydrocarbons, hexalin, a cyclic terpene, a cyclic terpinene, 1-phenyl-1-cyclohexene, 1-tert-butyl-1-cyclohexene, terpinolene, γ-terpinene, α-terpinene, α-pinene, terpineol, methyl naphthalene and mixtures thereof.