Method for fabricating chip elements provided with wire insertion grooves
View Patent ↗The invention relates to a method for fabricating chip elements provided with a groove from devices formed on a wafer. The method comprises the steps consisting in, depositing a sacrificial film on the wafer so as to leave a central part of each device exposed and to cover an edge of the device at the level of which the groove is to be formed; applying a mold on the sacrificial film; injecting a hardenable material into the mold; hardening the hardenable material; dicing the wafer between the devices; and eliminating the sacrificial film.
1. A method for fabricating chip elements provided with a groove from devices formed on a wafer comprising the following steps:
depositing a sacrificial film on the wafer so as to leave a central part of each device exposed and to cover an edge of the device at the level of which the groove is to be formed;
applying a mold on the sacrificial film;
injecting a hardenable material into the mold;
hardening the hardenable material;
dicing the wafer between the devices; and
eliminating the sacrificial film.
2. The method according to claim 1 , wherein the mold comprises a cavity associated with each chip.
3. The method according to claim 1 , wherein the dicing step takes place before the sacrificial film elimination step.
4. The method according to claim 1 , wherein the dicing cuts formed in the dicing step do not pass completely through the wafer, the method further comprising a step consisting in grinding the wafer on the rear surface thereof until the dicing cuts are reached.
5. The method according to claim 1 , wherein the wafer is fixed via its rear surface to a support plate, the method comprising a step consisting in removing the wafer from the support plate after the dicing step.