Light-emitting element and the manufacturing method thereof
A light-emitting element includes a light-emitting stack includes: a first semiconductor layer; an active layer formed on the first semiconductor layer; and a second semiconductor layer formed on the active layer; a recess structure formed through the second semiconductor layer, the active layer, and extended in the first semiconductor layer, wherein the first semiconductor layer includes a contact region defined by the recess structure; a first electrode structure including a first contact portion on the contact region of the first semiconductor layer, and a second contact portion laterally extended from the first contact portion into the first semiconductor layer; and a dielectric layer formed on side surfaces of the second semiconductor layer and the active layer to insulate the second semiconductor layer and the active layer from the first contact portion.
1. A light-emitting element comprising:
a light-emitting stack comprising: a first semiconductor layer; an active layer formed on the first semiconductor layer; and a second semiconductor layer formed on the active layer;
a recess structure formed through the second semiconductor layer, the active layer, and extended into the first semiconductor layer, wherein the first semiconductor layer comprises a contact region defined by the recess structure;
a first electrode structure comprising a first contact portion on the contact region of the first semiconductor layer, and a second contact portion laterally extended from the first contact portion into the first semiconductor layer; and
a dielectric layer formed on side surfaces of the second semiconductor layer and the active layer to insulate the second semiconductor layer and the active layer from the first contact portion of the first electrode structure.
2. The light-emitting element according to claim 1 , wherein the first electrode structure comprises a bonding electrode and an extension electrode extended from the bonding electrode, and the second contact portion is extended from the extension electrode.
3. The light-emitting element according to claim 1 , wherein the first electrode structure comprises a bonding electrode and an extension electrode extended from the bonding electrode, and the second contact portion is extended from the bonding electrode.
4. The light-emitting element according to claim 1 , wherein the first electrode structure comprises a bonding electrode and an extension electrode extended from the bonding electrode, and the second contact portion is extended from the bonding electrode and the extension electrode.
5. The light-emitting element according to claim 1 , further comprising an etching stop layer formed between the first contact portion of the first electrode structure and the contact region of the first semiconductor layer.
6. The light-emitting element according to claim 1 , further comprising a second electrode structure formed on the second semiconductor layer.
7. The light-emitting element according to claim 1 , wherein the second contact portion is under the active layer.
8. The light-emitting element according to claim 1 , wherein the surface of the contact region of the first semiconductor layer is an arc surface.
9. A manufacturing method of a light-emitting element comprising steps of:
providing a light-emitting element comprising a substrate; and a light-emitting stack including a first semiconductor layer, an active layer formed on the first semiconductor layer, and a second semiconductor layer formed on the active layer;
forming at least a recess structure through the second semiconductor layer and the active layer, and extended into first semiconductor layer;
forming a dielectric layer on the second semiconductor layer and the active layer in the recess structure;
forming an embedded hole laterally extended from the recess structure into the first semiconductor layer; and
forming a first electrode structure on the first semiconductor layer via the recess structure and the embedded hole.
10. The manufacturing method of a light-emitting element according to claim 9 , wherein the method of forming the recess structure and the dielectric layer comprises steps of: forming an initial recess structure through the second semiconductor layer and the active layer to expose the first semiconductor layer; forming the dielectric layer on the second semiconductor layer and the initial recess structure; removing the dielectric layer on the bottom surface of the initial recess structure; and extending the initial recess structure into the first semiconductor layer.
11. The manufacturing method of a light-emitting element according to claim 9 , further comprising forming an etching stop layer on the bottom surface of the recess structure before forming the embedded hole.
12. The manufacturing method of a light-emitting element according to claim 9 , wherein the method of forming the first electrode structure comprises chemical plating or electro plating.
13. The manufacturing method of a light-emitting element according to claim 9 , further comprising simultaneously forming a second electrode structure on the second semiconductor layer when forming the first electrode structure.
14. The manufacturing method of a light-emitting element according to claim 13 , wherein the method of forming the first electrode structure and second electrode comprises chemical plating or electro plating.
15. A manufacturing method of a light-emitting element comprising steps of:
providing a light-emitting element comprising a substrate; and a light-emitting stack including a first semiconductor layer, an active layer formed on the first semiconductor layer, and a second semiconductor layer formed on the active layer;
forming a recess structure through the second semiconductor layer, the active layer, and extended in the first semiconductor layer;
forming a dielectric layer on the second semiconductor layer and the active layer in the recess structure during the step of forming the recess structure;
forming a chamber extended from the recess structure into the first semiconductor layer; and
forming a first electrode structure on the first semiconductor layer via the recess structure and the chamber.
16. The manufacturing method of a light-emitting element according to claim 15 , wherein the method of forming the first electrode structure comprises chemical plating or electro plating.
17. The manufacturing method of a light-emitting element according to claim 15 , further comprising simultaneously forming a second electrode structure on the second semiconductor layer when forming the first electrode structure.
18. The manufacturing method of a light-emitting element according to claim 17 , wherein the method of forming the first electrode structure and second electrode comprises chemical plating or electro plating.
19. The manufacturing method of a light-emitting element according to claim 15 , wherein the method of forming the recess structure comprises steps of: forming an initial recess structure through the second semiconductor layer and the active layer to expose the first semiconductor layer; conformably forming the dielectric layer on the second semiconductor layer and the initial recess structure; removing the dielectric layer on the bottom surface of the initial recess structure; and extending the initial recess structure into the first semiconductor layer.
20. The manufacturing method of a light-emitting element according to claim 15 , wherein the chamber is vertically and laterally extended from the recess structure.