Optical device
View Patent ↗In an optical device 1 in which a wavelength converting element 20 is disposed as an optical element on a silicon substrate 10 , configuration includes heaters 40 a and 40 b formed on the silicon substrate 10 ; and micro bumps 30 a, 30 b that are made of Au, that bond the silicon substrate 10 and the wavelength converting element 20 , and that transfer the heat generated by the heaters 40 a, 40 b to the wavelength converting element 20.
1. An optical device in which an optical element that has a waveguide is mounted to a substrate, the optical device comprising:
a heater formed on the substrate; and
a micro bump that is disposed above the heater and in a region other than a region below the waveguide, that is made of Au, that bonds the substrate and the optical element, and that transfers to the optical element, heat generated by the heater, wherein
the optical element is mounted to the substrate such that the waveguide is in proximity to the substrate, and
the heater and the micro bump are disposed near the waveguide.
2. The optical device according to claim 1 , comprising a wavelength converting element as the optical element.
3. The optical device according to claim 1 , wherein the heater is formed in a region other than the region below the waveguide.
4. The optical device according to claim 1 , wherein
a groove portion or a through hole that prevents heat transfer between a region where the heater is disposed and other regions, is disposed in the substrate.
5. The optical device according to claim 1 , wherein
a groove portion or a through hole that prevents heat transfer between a region where the heater is disposed and other regions, is disposed in the optical element.
6. The optical device according to claim 1 , wherein
the optical element is mounted to the substrate such that the waveguide faces toward the substrate.
7. The optical device according to claim 1 , wherein
the optical element is a waveguide-embedded type.
8. The optical device according to claim 1 , wherein
the substrate is a silicon substrate.