Semiconductor light-emitting element for flip-chip mounting
View Patent ↗The present invention is directed to the provision of a semiconductor light-emitting element that has an electrode formed with a desired thickness using a plated metal layer. A semiconductor light-emitting element for flip-chip mounting on a circuit substrate includes a semiconductor layer including a light-emitting layer, an N-side bump electrode for connecting the semiconductor layer to the circuit substrate, and a P-type bump electrode for connecting the semiconductor layer to the circuit substrate, wherein the N-side bump electrode and the P-type bump electrode each include an under-bump metal layer and a plated metal layer, the under-bump metal layer includes a high-reflectivity metal layer disposed on a side that faces the semiconductor layer and a metal layer disposed on a side opposite from the semiconductor layer, and the plated metal layer has a thickness not less than 3 μm but not greater than 30 μm.
1. A semiconductor light-emitting element for flip-chip mounting on a circuit substrate, comprising:
a semiconductor layer including a light-emitting layer;
a protective layer for protecting said semiconductor layer;
a transparent material disposed between said light-emitting layer and said protective layer;
an N-side bump electrode for connecting said semiconductor layer to said circuit substrate; and
a P-side bump electrode for connecting said semiconductor layer to said circuit substrate,
wherein:
said N-side bump electrode and said P-side bump electrode each include an under-bump metal layer and an electrolytically plated metal layer;
said under-bump metal layer includes a high-reflectivity metal layer disposed on a side that faces said semiconductor layer and a metal layer disposed on a side opposite from said semiconductor layer;
said plated metal layer has a thickness not smaller than 3 μm but not larger than 30 μm; and
said N-side bump electrode and said P-side bump electrode are disposed over said light-emitting layer.
2. The semiconductor light-emitting element according to claim 1 , wherein said plated metal layer has a thickness not less than 10 μm but not greater than 30 μm.
3. The semiconductor light-emitting element according to claim 1 , wherein said high-reflectivity metal layer is an Al layer or an Ag layer.
4. The semiconductor light-emitting element according to claim 1 , wherein said N-side bump electrode and said P-side bump electrode have the same plan shape as said under-bump metal layers included in said N-side bump electrode and said P-side bump electrode, respectively.
5. The semiconductor light-emitting element according to claim 1 , wherein said under-bump metal layer occupies an area larger than the area occupied by said plated metal layer.
6. The semiconductor light-emitting element according to claim 1 , wherein said protective layer has openings formed therein, and said N-side bump electrode and said P-side bump electrode are respectively connected electrically to said semiconductor layer at said openings.
7. The semiconductor light-emitting element according to claim 1 , wherein said N-side bump electrode is disposed so as to overlap with said light-emitting layer.
8. The semiconductor light-emitting element according to claim 1 , wherein said metal layer is a metal layer for preventing atomic diffusion.