Resonator structures and method of making
View Patent ↗A resonator in the Swiss-roll structure, method of making the resonator structure and the system employing the resonator are disclosed. The resonator includes a plurality of layers, including a ceramic layer and a metallic layer. The ceramic and metallic layers are configured in a Swiss-roll form such that the neighboring ceramic layers are separated by the metallic layer. Further, the ceramic layer includes materials that have a dielectric constant of at least about 10 and dielectric loss tangent less than about 0.01 in the frequency range of about 1 KHz to about 100 MHz. The method of forming the resonator includes the steps of disposing a metallic layer, depositing a dielectric ceramic layer, and forming a Swiss-roll structure of the metallic and ceramic layers. Alternate method includes swaging the dielectric material filled metal tubes and forming into Swiss-rolls. Further steps include heat treating the resultant Swiss-roll structure in vacuum, inert atmosphere, or reducing atmosphere to form a monolithic Swiss-roll structure, such that the air gap between turns of the Swiss-roll structure is less than about 1 μm.
1. A method of forming a resonator, comprising:
disposing a metallic layer;
providing a buffer layer over the metallic layer;
depositing a dielectric ceramic layer over the buffer layer;
forming a Swiss-roll structure of the metallic layer and the ceramic layer; and
heat treating the Swiss-roll structure in a vacuum, inert atmosphere, or reducing atmosphere to form a monolithic Swiss-roll structure, wherein an air gap between turns of the Swiss-roll structure is less than about 1 μm.
2. The method of claim 1 , wherein the metallic layer is prepared by disposing metallic powders.
3. The method of claim 1 , wherein the heat treating of the metallic layer, buffer layer, and ceramic layer of the Swiss-roll structure obtains an integrated monolithic structure of density greater than 98% by volume.
4. The method of claim 3 , wherein the temperature of the heat treatment is less than the melting point of the metallic layer.
5. A method of forming a resonator, comprising:
filling-in a metallic hollow tube with a dielectric ceramic material to form a filled metallic tube;
swaging or rolling of the filled metallic tube to form a layered structure comprising a ceramic layer in between two metallic layers;
winding the layered structure to form a Swiss-roll structure from the two metallic layers and the ceramic layer; and
heat treating the Swiss-roll structure in a vacuum, inert atmosphere, or reducing atmosphere to form a monolithic Swiss-roll structure, wherein an air gap between turns of Swiss-roll structure is less than about 1 μm.
6. The method of claim 5 , further comprising machining or chemically etching outer edges of the Swiss-roll structure to expose the ceramic and the two metallic layers.