Method for producing an optoelectronic semiconductor component and optoelectronic semiconductor component
View Patent ↗An optoelectronic semiconductor component includes a semiconductor body connected to a main area of a carrier body by a solder layer, wherein sidewalls of the semiconductor body are provided with a dielectric layer, and a mirror layer applied to the dielectric layer.
1. A method for producing an optoelectronic semiconductor component comprising:
growing an epitaxial layer sequence onto a growth substrate,
applying a contact layer and a subsequent barrier layer to a surface of the epitaxial layer sequence which is remote from the growth substrate,
structuring the epitaxial layer sequence to form individual semiconductor bodies by producing trenches in the epitaxial layer sequence,
applying a dielectric layer at least to sidewalls of the semiconductor bodies which are uncovered in the trenches,
applying a first part of a solder layer to the semiconductor bodies and into the trenches between the semiconductor bodies,
applying a second part of the solder layer to a carrier body,
connecting the semiconductor bodies at a side remote from the growth substrate to the carrier body by the solder layer, wherein the first part and the second part fuse together and the trenches between the semiconductor bodies are filled by the solder layer, and
detaching the growth substrate.
2. The method according to claim 1 , wherein the dielectric layer contains a silicon nitride or a silicon oxide.
3. The method according to claim 1 , further comprising, after the dielectric layer has been applied, applying a mirror layer to the dielectric layer.
4. The method according to claim 3 , wherein the mirror layer contains Ag, Pt, Al or Rh.
5. The method according to claim 3 , further comprising applying a protective layer to the mirror layer.
6. The method according to claim 5 , wherein the protective layer contains a silicon nitride, a silicon oxide, a metal or a metal compound.
7. The method according to claim 1 , further comprising removing the solder layer from the trenches between the semiconductor bodies after the growth substrate has been detached.
8. The method according to claim 1 , wherein the solder layer remains in the trenches between the semiconductor bodies after the growth substrate has been detached.
9. The method according to claim 1 , further comprising separating the carrier body in the trenches to form individual semiconductor components.