Method and apparatus for the formation of an electronic device
View Patent ↗A process of forming an electronic device, by forming the source and drain contacts using photolithography, incorporating a self-assembled monolayer (SAM) over the electrical contacts to form an increased work function of the source and drain electrodes and further forming more favorable charge injection properties or within the channel region to improve film morphology and therefore improve charge transport. The SAM material is added to the photoresist stripper during a step of the photolithography process of forming electrical contacts.
1. A process of forming an electronic device, the electronic device comprising a substrate, a source electrode and a drain electrode and a device channel neighboring said source electrode and drain electrode, wherein a surface of said substrate comprises a surface of said device channel and at least one surface of a conductive layer comprises a surface of said source electrode and a surface of said drain electrode, the process comprising:
removing photoresist from at least one surface of the electronic device using a photoresist stripper mixture, wherein the photoresist stripper mixture comprises a first self-assembled monolayer material and photoresist stripper for dissolving photoresist, thereby depositing a self-assembled monolayer on said at least one surface of said electronic device, and depositing semiconductor material on said self-assembled monolayer deposited on said conductive layer, without ozone cleaning of said conductive layer.
2. The process according to claim 1 , wherein said self-assembled monolayer is a first self-assembled monolayer, the process further comprising:
depositing a second self-assembled monolayer material, which is different from said first self-assembled monolayer material, on a surface of said substrate.
3. The process according to claim 1 , the process further comprising using said photoresist in a photolithography process of patterning said conductive layer to form a source electrode and a drain electrode.
4. The process according to claim 1 , wherein the self-assembled monolayer material comprises a thiol compound comprising sulphur.
5. The process according to claim 4 , wherein the self-assembled monolayer material comprises pentafluorobenzenethiol.
6. The process according to claim 1 , wherein the photoresist stripper comprises 2-amino ethanol, glycol ether and de-ionized water.
7. The process according to claim 1 , wherein the ratio of the self-assembled monolayer material to the photoresist stripper is about 0.0001%-1%.
8. The process of claim 1 , wherein said conductive layer comprises a material selected from a group consisting of: silver, and gold.
9. A process of forming an electronic device, the electronic device comprising a substrate comprising a polymer film, a source electrode and a drain electrode and a device channel neighboring said source electrode and said drain electrode, wherein a surface of said substrate comprises a surface of said device channel and at least one surface of a conductive layer comprises a surface of said source electrode and a surface of said drain electrode, the process comprising:
removing photoresist from at least one surface of the electronic device using a photoresist stripper mixture, wherein the photoresist stripper mixture comprises a first self-assembled monolayer material and photoresist stripper for dissolving photoresist, thereby depositing a self-assembled monolayer on said polymer film of said surface of said device channel of said electronic device.
10. The process according to claim 9 , the process further comprising using said photoresist in a photolithography process of patterning said conductive layer to form said source electrode and said drain electrode.
11. A process as claimed in claim 9 , wherein said substrate is a film selected from a group consisting of: polyethyleneterephtalate, and polyethyleneterephtalene.
12. A process as claimed in claim 9 , wherein said self-assembled monolayer material comprises a silane.
13. A process of forming an electronic device, the process comprising:
removing photoresist from at least one surface of the electronic device using a photoresist stripper mixture, wherein the photoresist stripper mixture comprises a first self-assembled monolayer material and photoresist stripper for dissolving photoresist, thereby depositing a self-assembled monolayer on said at least one surface of said electronic device, and depositing semiconductor material on said self-assembled monolayer deposited on said conductive layer, without ozone cleaning of said conductive layer.
14. The process according to claim 13 , wherein said electronic device includes a substrate; wherein said self-assembled monolayer is a first self-assembled monolayer wherein said electronic device comprises a source electrode and a drain electrode, the process further comprising:
depositing a second self-assembled monolayer material, which is different from said first self-assembled monolayer material, on a surface of said substrate.
15. The process according to claim 13 , the process further comprising:
using said photoresist in a photolithography process of patterning a conductive layer to form a source electrode and a drain electrode.
16. The process according to claim 13 , wherein the self-assembled monolayer material comprises a thiol compound comprising sulphur.
17. The process according to claim 13 , wherein the self-assembled monolayer material comprises pentafluorobenzenethiol.
18. The process according to claim 13 , wherein the photoresist stripper comprises 2-amino ethanol, glycol ether and de-ionized water.
19. The process according to claim 13 , wherein the ratio of the self-assembled monolayer material to the photoresist stripper is about 0.0001%-1%.
20. The process of claim 13 , wherein said conductive layer comprises a material selected from a group consisting of: silver, and gold.