Wafer level chip scale package without an encapsulated via
View Patent ↗An improved wafer level chip scale packaging technique is described which does not use an encapsulated via to connect between a redirection layer and a pad within the pad ring on the semiconductor die. In an embodiment, a first dielectric layer is formed such that it terminates on each die within the die's pad ring. Tracks are then formed in a conductive layer which contact one of the pads and run over the edge of an opening onto the surface of the first dielectric layer. These tracks may be used to form an electrical connection between the pad and a solder ball.
1. A packaged semiconductor device comprising:
a semiconductor die comprising a plurality of pads arranged in a pad ring around the periphery of the die on an active face of the die; and
a first dielectric layer formed on the active face, wherein the first dielectric layer comprises a first region terminated within the pad ring and a further region between the pad ring and an edge of the die, such that an area around the pad ring is clear of the first dielectric layer;
a plurality of tracks formed in a conductive layer, wherein each track is connected to one of the plurality of pads and comprises an upper portion which is formed on the first dielectric layer and wherein at least one of the plurality of tracks comprises an upper portion which is formed on the further region of the first dielectric layer;
a second dielectric layer arranged to encapsulate the active face; and
a plurality of solder elements, each of the solder elements being electrically connected to an upper portion of a track.
2. The packaged semiconductor device according to claim 1 , wherein each track is formed over a termination of the first dielectric layer.
3. The packaged semiconductor device according to claim 1 , wherein the second dielectric layer is terminated outside of the periphery of the active face of the die.
4. The packaged semiconductor device according to claim 1 , wherein the device is a wafer level chip scale packaged device.
5. The packaged semiconductor device according to claim 1 , wherein each track is directly connected to one or more of the plurality of pads.
6. The packaged semiconductor device according to claim 5 , wherein each track is terminated within an area of the one of the plurality of pads to which it is directly connected.
7. The packaged semiconductor device according to claim 1 , wherein at least one of the plurality of tracks connects more than one pad together and comprises an upper portion which is formed on the further region of the first dielectric layer.
8. The packaged semiconductor device according to claim 7 , wherein the at least one of the plurality of tracks further comprises a second upper portion formed on the first region of the first dielectric layer.