Surface acoustic wave resonator, surface acoustic wave oscillator, and surface acoustic wave module unit
View Patent ↗It is possible to reduce the size of a surface acoustic wave resonator by enhancing the Q value. In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, a line occupying ratio is defined as a value obtained by dividing the width of one electrode finger by the distance between the center lines of the gaps between one electrode finger and the electrode fingers adjacent to both sides thereof, and the IDT includes a region formed by gradually changing the line occupying ratio from the center to both edges so that the frequency gradually becomes lower from the center to both edges than the frequency at the center of the IDT.
1. A surface acoustic wave resonator comprising:
a piezoelectric substrate; and
an interdigitated transducer including electrode fingers for exciting surface acoustic waves disposed on the piezoelectric substrate,
wherein a line occupying ratio is defined as a value obtained by dividing a width of one of the electrode fingers by a distance between a center line of a gap between the one electrode finger and an adjacent one of the electrode fingers and a center line of a gap between the one electrode finger and the adjacent one of the electrode fingers to the other side thereof, and
wherein the interdigitated transducer includes a region formed by sequentially changing the line occupying ratio from a center to both edges thereof so that the frequency gradually becomes lower from the center to both edges than the frequency at the center of the interdigitated transducer.
2. The surface acoustic wave resonator according to claim 1 , wherein the region in which the frequency gradually becomes lower from the center of the interdigitated transducer to both edges thereof has the line occupying ratio larger than that at the center of the interdigitated transducer.
3. The surface acoustic wave resonator according to claim 1 , wherein a region in which the line occupying ratio is constant is disposed at the center of the interdigitated transducer, and
wherein a ratio Nf/N of the number of pairs of electrode fingers Nf in a region in which the line occupying ratio is constant to a total number of pairs of electrode fingers N in the interdigitated transducer is in the range of 0<Nf/N<0.59.
4. The surface acoustic wave resonator according to claim 1 , wherein a ratio ηe/ηc of the line occupying ratio ηe at the edge of the interdigitated transducer to the line occupying ratio ηc at the center of the interdigitated transducer is in the range of 1<ηe/ηc<1.79.
5. The surface acoustic wave resonator according to claim 1 , wherein a ratio ηr/ηe of the line occupying ratio ηr in a reflector to the line occupying ratio ηe at the edge of the interdigitated transducer is in the range of 0.65≦ηr/ηe≦1.58.
6. The surface acoustic wave resonator according to claim 1 , wherein the piezoelectric substrate is a crystal substrate with an Euler angle (−1° to +1°, 26.0° to 40.7°, 85° to 95°).
7. A surface acoustic wave oscillator comprising the surface acoustic wave resonator according to claim 1 and a circuit element that are mounted on a package.
8. A surface acoustic wave module unit comprising the surface acoustic wave resonator according to claim 1 that is mounted on a circuit board.
9. The surface acoustic wave resonator according to claim 2 , wherein a region in which the line occupying ratio is constant is disposed at the center of the interdigitated transducer, and
wherein a ratio Nf/N of the number of pairs of electrode fingers Nf in the region in which the line occupying ratio is constant to the total number of pairs of electrode fingers N in the interdigitated transducer is in the range of 0<Nf/N<0.59.
10. The surface acoustic wave resonator according to claim 2 , wherein a ratio ηe/ηηc of the line occupying ratio ηe at the edge of the interdigitated transducer to the line occupying ratio ηc at the center of the IDT is in the range of 1<ηe/ηc<1.79.
11. The surface acoustic wave resonator according to claim 2 , further comprising at least one reflector, wherein a ratio ηr/ηe of the line occupying ratio ηr in the at least one reflector to the line occupying ratio ηe at the edge of the interdigitated transducer is in the range of 0.65≦ηr/ηe≦1.58.
12. The surface acoustic wave resonator according to claim 2 , wherein the piezoelectric substrate is a crystal substrate with an Euler angle (−1° to +1°, 26.0° to 40.7°, 85° to 95°).
13. A surface acoustic wave oscillator comprising the surface acoustic wave resonator according to claim 2 and a circuit element that are mounted on a package.
14. A surface acoustic wave module unit comprising the surface acoustic wave resonator according to claim 2 that is mounted on a circuit board.