Surface acoustic wave resonator, surface acoustic wave oscillator, and surface acoustic wave module unit
View Patent ↗In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, the line occupying ratio causing the maximum electromechanical coupling coefficient and the line occupying ratio causing the maximum reflection of the surface acoustic waves in the IDT are different from each other, the center of the IDT has the line occupying ratio causing an increase in electromechanical coupling coefficient in comparison with the edges of the IDT, and the edges of the IDT have the line occupying ratio causing an increase in reflection of the surface acoustic waves in comparison with the center of the IDT.
1. A surface acoustic wave resonator in which an IDT including electrode fingers for exciting surface acoustic waves is disposed on a piezoelectric substrate,
wherein a line occupying ratio is defined as a value obtained by dividing the width of one electrode finger of the electrode fingers by the distance between a center line of a gap between the one electrode finger and the electrode finger adjacent to one side thereof and a center line of a gap between the one electrode finger and the electrode finger adjacent to the other side thereof,
wherein the line occupying ratio causing the maximum electromechanical coupling coefficient and the line occupying ratio causing the maximum reflection of the surface acoustic waves in the IDT are different from each other,
wherein the center of the IDT has the line occupying ratio causing an increase electromechanical coupling coefficient in comparison with the edges of the IDT,
wherein the edges of the IDT have the line occupying ratio causing an increase in reflection of the surface acoustic waves in comparison with the center of the IDT,
wherein an electrode finger pitch which is the distance between the centers of the neighboring electrode fingers in the IDT gradually increases from the center of the IDT to both edges thereof, and
wherein a ratio PTs/PT of the electrode finger pitch PTs at the edges ofthe IDT to the electrode finger pitch PT at the center of the IDT is in the range of 1<PTs/PT<1.0355.
2. The surface acoustic wave resonator according to claim 1 , wherein the line occupying ratio is gradually changed from the center of the IDT to the edges of the IDT.
3. The surface acoustic wave resonator according to claim 1 , wherein the piezoelectric substrate is a crystal substrate with an Euler angle (−1° to +1°, 113 ° to 135°, ±(40° to49 ° )),
wherein the line occupying ratio ηc at the center of the IDT is in the range of 0.3≦ηc≦0.5, and
wherein the line occupying ratio ηe at the edges of the IDT is in the range of 0.15≦ηe≦0.3.
4. The surface acoustic wave resonator according to claim 3 , wherein a ratio ηe/ηc of the line occupying ratio ηe at the edges of the IDT to the line occupying ratio ηc at the center of the IDT is in the range of 0.34<ηe/ηc<1.0.
5. The surface acoustic wave resonator according to claim 4 , wherein the ratio ηe/ηc of the line occupying ratio ηe at the edge of the IDT to the line occupying ratio ηc at the center of the IDT is in the range of 0.46≦ηe/ηc≦0.8.
6. The surface acoustic wave resonator according to claim 1 , wherein the ratio PTs/PT of the electrode finger pitch PTs at the edges of the IDT to the electrode finger pitch PT at the center of the IDT is in the range of 1.004≦PTs/PT≦1.0315.
7. The surface acoustic wave resonator according to claim 1 , wherein a region having a constant electrode finger pitch is disposed at the center of the IDT.
8. The surface acoustic wave resonator according to claim 7 , wherein a ratio Nf/N of the number of pairs of electrode fingers Nf in the region having the constant electrode finger pitch at the center of the IDT to the number of pairs of electrode fingers N in the IDT is in the range of 0<Nf/N<0.36.
9. A surface acoustic wave oscillator in which the surface acoustic wave resonator according to claim 1 and a circuit element are mounted on a package.
10. A surface acoustic wave module unit in which the surface acoustic wave resonator according to claim 1 is mounted on a circuit board.
11. The surface acoustic wave resonator according to claim 2 , wherein the piezoelectric substrate is a crystal substrate with an Euler angle (−1° to +1°, 113° to 135°, ±(40° to49° )),
wherein the line occupying ratio ηc at the center of the IDT is in the range of 0.3≦ηc≦0.5, and
wherein the line occupying ratio ηe at the edges of the IDT is in the range of 0.15≦ηe≦0.3.
12. The surface acoustic wave resonator according to claim 2 , wherein an electrode finger pitch which is the distance between the centers of the neighboring electrode fingers in the IDT gradually increases from the center of the IDT to both edges thereof.
13. A surface acoustic wave oscillator in which the surface acoustic wave resonator according to claim 2 and a circuit element are mounted on a package.
14. A surface acoustic wave module unit in which the surface acoustic wave resonator according to claim 2 is mounted on a circuit board.