CdTe semiconductor substrate for epitaxial growth and substrate container
View Patent ↗Provided is a CdTe-based semiconductor substrate for epitaxial growth, which is capable of growing good-quality epitaxial crystals without urging a substrate user to implement etching treatment before the epitaxial growth. A CdTe-based semiconductor substrate, in which tracks of linear polishing damage with a depth of 1 nm or more are not observed within a viewing range of 10 μm×10 μm when a surface of the substrate is observed by an atomic force microscope, and orange peel defects are not observed when the surface of the substrate is visually observed under a fluorescent lamp, can grow the good-quality epitaxial crystals.
1. A CdTe-based semiconductor substrate for epitaxial growth, wherein a track of a linear polishing damage with a depth of 1 nm or more is not observed within a viewing range of 10 μm×10 μm when a surface of the substrate is observed by an atomic force microscope, and an orange peel defect is not observed when the surface of the substrate is visually observed under a fluorescent lamp.
2. The CdTe-based semiconductor substrate for epitaxial growth according to claim 1 ,
wherein the surface of the substrate is subjected to predetermined polishing treatment, etching treatment responding to the polishing, and washing and drying treatment;
wherein the substrate is subsequently stored for 24 hours to 36 hours in a clean booth of Class 100;
wherein the substrate is subsequently subjected to light etching treatment with a light etching amount of 0.1 μm or more to 1 μm or less, and washing and drying treatment;
wherein the substrate is subsequently stored for 6 hours to 36 hours in the clean booth of Class 100 one more time; and
wherein the substrate is subsequently housed in a substrate container with a nitrogen gas atmosphere.
3. The CdTe-based semiconductor substrate for epitaxial growth according to claim 2 , wherein a deterioration in a thickness variation in the surface of the substrate due to the etching treatment is 0.4 μm or less.
4. A substrate container, which houses a substrate casing in a nitrogen gas atmosphere, the substrate casing housing the CdTe-based semiconductor substrate for epitaxial growth according to claim 1 .
5. A CdTe-based semiconductor substrate for epitaxial growth, wherein at least one viewing range of 10 μm×10 μm, in which a track of a linear polishing damage with a depth of 1 nm or more is not observed, exists on a surface of the substrate observed by an atomic force microscope, and an orange peel defect is not observed when the surface of the substrate is visually observed under a fluorescent lamp.
6. The CdTe-based semiconductor substrate for epitaxial growth according to claim 5 ,
wherein the surface of the substrate is subjected to a predetermined polishing treatment, a first etching treatment responding to the polishing, and washing and drying treatment;
wherein the substrate is subsequently stored for a first predetermined time in a clean booth;
wherein the substrate is subsequently subjected to a second etching treatment, and washing and drying treatment; and
wherein the substrate is subsequently stored for a second predetermined time in the clean booth.
7. The CdTe-based semiconductor substrate for epitaxial growth according to claim 6 , wherein a deterioration in a thickness variation in the surface of the substrate due to the first etching treatment is 0.4 μm or less.
8. The CdTe-based semiconductor substrate for epitaxial growth according to claim 6 , wherein the second etching treatment is a light etching amount of 0.1 μm or more to 1 μm or less.
9. The CdTe-based semiconductor substrate for epitaxial growth according to claim 6 , wherein the first predetermined time is 24 hours to 36 hours.
10. The CdTe-based semiconductor substrate for epitaxial growth according to claim 6 , wherein the second predetermined time is 6 hours to 36 hours.
11. The CdTe-based semiconductor substrate for epitaxial growth according to claim 6 , wherein the substrate is housed in a substrate container with a nitrogen gas atmosphere after the storing for the second predetermined time in the clean booth.
12. A substrate container, which houses a substrate casing in a nitrogen gas atmosphere, the substrate casing housing the CdTe-based semiconductor substrate for epitaxial growth according to claim 5 .