Inertial force sensor
View Patent ↗An inertial force sensor includes a detector element, a supporting body supporting the detector element, and a case holding the detector element via the first supporting body. The supporting body has flexibility and has a plate shape. The detector element includes a weight, a flexible coupling portion extending along a plane and supporting the weight, a fixing portion holding the weight via the coupling portion, and a detector detecting angular velocities about at least two axes non-parallel to each other. The supporting body extends in parallel with the plane from the detector element, and bends at a bending portion in a direction away from the plane. This inertial force sensor can detect the angular velocities while preventing erroneous detection caused by external impacts and vibrations.
1. An inertial force sensor comprising:
a detector element including
a weight,
a coupling portion extending along a plane and supporting the weight,
a fixing portion holding the weight via the coupling portion, and
a detector detecting angular velocities about at least two axes non-parallel to each other;
a first supporting body supporting the detector element; and
a case holding the detector element via the first supporting body,
wherein the first supporting body extends in parallel with the plane from the detector element, and bends at a first bending portion in a direction away from the plane, and
wherein a length of a portion of the first supporting body from the first bending point to the case when projected onto the plane is larger than a length of the portion of the first supporting body in a direction perpendicular to the plane.
2. The inertial force sensor according to claim 1 ,
wherein the first supporting body has a width in a direction perpendicular to a direction in which the first supporting body extends from the detector element, and
wherein the direction of the width of the first supporting body is parallel with the plane at the first bending portion.
3. The inertial force sensor according to claim 1 , further comprising:
a second supporting body supporting the detector element,
wherein the second supporting body extends from the detector element in a direction that is in parallel with the plane and in non-parallel with the first supporting body, and bends at a second bending portion in a direction away from the plane.
4. An inertial force sensor comprising:
a detector element including
a weight,
a coupling portion supporting the weight, the coupling portion extending along a plane substantially parallel to the detector element,
a fixing portion holding the weight via the coupling portion, and
a detector detecting angular velocities about at least two axes non-parallel to each other;
a supporting body supporting the detector element; and
a case holding the detector element via the supporting body,
wherein the supporting body includes a first portion extending in parallel with the plane from the detector element, a bending portion bending in a direction away from the plane and a second portion extending in a non-parallel direction with the plane, and
wherein a length of the second portion of the supporting body when projected onto the plane is larger than a length of the second portion of the supporting body in a direction perpendicular to the plane.
5. The inertial force sensor according to claim 4 , wherein the first supporting body has a plate shape.
6. An inertial force sensor comprising:
a detector element having an outer peripheral edge, the detector element including
a weight,
a coupling portion extending along a plane and supporting the weight,
a fixing portion holding the weight via the coupling portion, and
a detector detecting angular velocities about at least two axes non-parallel to each other;
a first supporting body supporting the detector element; and
a case holding the detector element via the first supporting body,
wherein the first supporting body extends in parallel with the plane from the outer peripheral edge of the detector element and away from the detector element, and bends at a first bending portion in a direction away from the plane.
7. The inertial force sensor according to claim 6 ,
wherein the first supporting body has a width in a direction perpendicular to a direction in which the first supporting body extends from the detector element, and
wherein the direction of the width of the first supporting body is parallel with the plane at the first bending portion.
8. The inertial force sensor according to claim 7 , further comprising:
a second supporting body supporting the detector element,
wherein the second supporting body extends from the detector element in a direction that is in parallel with the plane and in non-parallel with the first supporting body, and bends at a second bending portion in a direction away from the plane.
9. The inertial force sensor according to claim 8 , wherein the second supporting body has a plate shape.
10. The inertial force sensor according to claim 6 , wherein the first supporting body has a plate shape.