STERILISER WITH EXHAUST GAS CLEANING SYSTEM FOR DECOMPOSING NOX WITH OZONE

1 . An exhaust system for exhausting an exhaust gas used for sterilizing an item to be sterilized by using a high concentration NO 2 gas, comprising:

an ozone generator, a gas treatment means for adsorbing ozone generated by the ozone generator and NO 2 in the exhaust gas and accelerating generation of dinitrogen pentoxide or nitric acid by a reaction of the ozone and NO 2 to retain the resultant, and an exhaust apparatus for exhausting the exhaust gas.

2 . The exhaust system according to claim 1 , wherein the ozone generator comprises an ozonizer and an ozone chamber for storing ozone generated by the ozonizer.

3 . The exhaust system according to claim 1 , wherein a buffer portion for adjusting a mixture ratio of NO 2 in the exhaust gas and ozone is further provided at an upstream side from the gas treatment means.

4 . The exhaust system according to claim 1 , wherein the gas treatment means uses an adsorption catalyst.

5 . The exhaust system according to claim 1 , wherein the exhaust apparatus exhausts the exhaust gas used for sterilization in multiple times.

6 . A sterilizing apparatus comprising:

(a) an NO 2 gas supply system configured by a circulating path in which a chamber for storing a high concentration NO 2 gas, a plasma generator, and a circulating means are connected;

(b) a sterilizing chamber connected to the chamber via a first open/closure device; and

(c) the exhaust system according to claim 1 connected to the sterilizing chamber via a second open/closure device.

7 . The sterilizing apparatus according to claim 6 , wherein the chamber is connected to the exhaust system via a third open/closure device.

8 . The sterilizing apparatus according to claim 6 , wherein the sterilizing chamber is provided with a measuring path for returning the high concentration NO 2 gas in the sterilizing chamber to the sterilizing chamber through an NO 2 sensor.

9 . The sterilizing apparatus according to claim 6 , wherein a plurality of sterilizing chambers is connected to a single exhaust system.

10 . A sterilizing method using the sterilizing apparatus according to claim 6 , wherein in a gas exhausting step for exhausting a high concentration NO 2 gas used for sterilizing an item to be sterilized, the high concentration NO 2 gas is exhausted to the exhaust system in part with a predetermined NO 2 gas contents.

11 . A sterilizing method using the sterilizing apparatus according to claim 6 , wherein in a gas exhausting step for exhausting a used high concentration NO 2 gas after a sterilizing step for sterilizing an item to be sterilized, a procedure of exhausting the high concentration NO 2 gas in the sterilizing chamber to the exhaust gas treatment means by an exhaust apparatus of the exhaust system to obtain a negative pressure in the sterilizing chamber while the first open/closure device is closed and the second open/closure device is open, and subsequently, sucking the high concentration NO 2 gas remaining the chamber into the sterilizing chamber by the negative pressure by opening the first open/closure device and closing the second open/closure device is repeated.

12 . A sterilizing method using the sterilizing apparatus according to claim 6 , comprising the steps of:

(d) setting an item to be sterilized in the sterilizing chamber (setting step);

(e) vacuuming the inside of the sterilizing chamber (vacuuming step);

(f) humidifying the inside of the sterilizing chamber (humidifying step);

(g) opening the first open/closure device to supply the NO 2 gas generated by the NO 2 gas system and stored in the chamber to the sterilizing chamber (supplying step);

(h) filling the dried gas mixture in the chamber (air charging step); and

(i) generating NO 2 gas by driving the NO 2 gas supply system (circulating step),

wherein the steps (g) to (i) are repeated a plurality of times.

13 . The sterilizing method according to claim 12 , wherein before the air charging step of step (h), a step of closing the first open/closure device and opening the third open/closure device to directly couple the chamber and exhaust system to exhaust the NO 2 gas remaining in the chamber with the exhaust system and to vacuum the chamber (gas exhausting step) is performed.