Solid-state image pickup device and method for manufacturing same, and image pickup apparatus
View Patent ↗Disclosed herein is a solid-state image pickup device of a type wherein a pixel is configured to include a sensor unit capable of photoelectric conversion, the image pickup device including: a semiconductor substrate; a charge storage region of a first conduction type, which is formed in the semiconductor substrate and constitutes a sensor unit; a charge storage sub-region made of an impurity region of the first conduction type, which is formed, in plural layers, in the semiconductor substrate below the charge storage region serving as a main charge storage region and wherein at least one or more of the plural layers are formed entirely across a pixel; and a device isolation region that is formed in the semiconductor substrate, isolates pixels from one another, and is made of an impurity region of a second conduction type.
1. A solid-state image pickup device of a type including a plurality of pixels, each pixel is configured to include a sensor unit capable of photoelectric conversion, said image pickup device comprising:
a semiconductor substrate;
a charge storage region of a first conduction type, which is formed in said semiconductor substrate and is configured to be a sensor unit and a main charge storage region;
a charge storage sub-region made of an impurity region of the first conduction type, said charge storage sub-region comprising a plurality of layers in said semiconductor substrate below said charge storage region ; and
a device isolation region in the semiconductor substrate configured to isolate said pixels from one another said device isolation region made of an impurity region of a second conduction type,
wherein,
at least one charge storage sub-region layer extends across each pixel to the device isolation region.
2. The solid-state image pickup device according to claim 1 , wherein, for each pixel, said charge storage sub-region formed entirely across said pixel is formed at a depth of not smaller than 1 μm from a surface of said semiconductor substrate.
3. The solid-state image pickup device according to claim 1 , further comprising a semiconductor well region, which is formed entirely across each pixel below said charge storage sub-region in said semiconductor substrate and is made of an impurity region of the second conduction type.
4. An image pickup apparatus comprising:
a focusing optical unit focusing incoming light;
a solid-state image pickup device comprising a plurality of pixels, each pixel configured to include a sensor unit capable of photoelectric conversion, the solid-state image pickup device further comprising (a) a semiconductor substrate, (b) a charge storage region of a first conduction type in said semiconductor substrate and configured to be a sensor unit and a main charge storage region, (c) a charge storage sub-region, made of an impurity region of the first conduction type, said charge storage sub-region comprising a plurality of layers in said substrate below said charge storage, and (d) a device isolation region in said semiconductor substrate configured to isolate said pixels from one another, said device isolation region made of an impurity region of a second conduction type,
wherein,
at least one charge storage sub-region layer extends across each pixel to the device isolation region; and
a signal processor processing a signal obtained by the photoelectric conversion with said solid-state image pickup device.