System and method for depositing a material on a substrate
View Patent ↗A method and apparatus for depositing a film on a substrate includes introducing a material and a carrier gas into a heated chamber. The material may be a semiconductor material, such as a cadmium chalcogenide. A resulting mixture of vapor and carrier gas containing no unvaporized material is provided. The mixture of vapor and carrier gas are remixed to achieve a uniform vapor/carrier gas composition, which is directed toward a surface of a substrate, such as a glass substrate, where the vapor is deposited as a uniform film.
1. A distributor assembly comprising:
a first chamber for receiving a solid material and carrier gas and comprising one or more first chamber walls which are permeable to a vapor and the carrier gas but impermeable to the solid material;
a heating element associated with the first chamber for vaporizing at least a portion of the solid material;
a second chamber for receiving the vapor and the carrier gas from the first chamber and for providing a material flow sufficiently indirect to mix the vapor and the carrier gas into a substantially uniform vapor/carrier gas composition;
a third chamber for receiving the vapor and the carrier gas from the second chamber including a third chamber inlet located proximate to an outlet of the second chamber; and
a third chamber outlet for providing the uniform vapor/carrier gas composition for deposition on a surface of a substrate, wherein the third chamber outlet is offset from the third chamber inlet such that the flow direction of the vapor/carrier gas must change while flowing from the third chamber inlet to the third chamber outlet.
2. The distributor assembly of claim 1 , wherein the first chamber and the second chamber are tubular, and the first tubular chamber is disposed within the second tubular chamber such that the second tubular chamber sheaths the first tubular chamber.
3. The distributor assembly of claim 1 , wherein the one or more first chamber walls comprise the heating element, which is heated by resistive heating.
4. The distributor assembly of claim 1 , wherein the heating element is capable of maintaining the first chamber at a temperature of at least 500 degrees C.
5. The distributor assembly of claim 4 , wherein the heating element is capable of maintaining the first chamber at a temperature of at least 700 degrees C.
6. The distributor assembly of claim 1 , wherein the second chamber comprises at least one distribution hole.
7. The distributor assembly of claim 1 , wherein the second chamber comprises walls that are substantially impermeable to the vapor and the carrier gas.
8. The distributor assembly of claim 2 , wherein the third chamber is tubular and forms a sheath around the second chamber.
9. The distributor assembly of claim 1 , wherein the third chamber is formed in a block, and comprises:
a passageway within the block connecting the third chamber inlet and the third chamber outlet.
10. The distributor assembly of claim 9 , wherein the second chamber has an external surface, and the second chamber external surface and the third chamber outlet are configured such that the vapor/carrier gas is disbursed by the external surface of the second chamber after flowing from the third chamber outlet for deposition on the substrate.
11. The distributor assembly of claim 10 , wherein the third chamber outlet comprises between about 10 to about 50 distribution holes.
12. The distributor assembly of claim 9 , wherein the second chamber has an external surface and the block is at least partially surrounding the second chamber and configured to define a flow path between the block and the external surface of the second chamber and proximate to the third chamber outlet such that the flow direction of the vapor/carrier gas must change while flowing through the flow path for deposition on the surface of the substrate.
13. A system for depositing a film on a substrate comprising:
a material source connected to a distributor assembly for introducing a solid material and carrier gas into the distributor assembly, wherein the distributor assembly comprises:
a first chamber for receiving the solid material and the carrier gas and comprising one or more first chamber walls which are permeable to a vapor and the carrier gas;
a heating element associated with the first chamber for providing a temperature high enough that at least a portion of the solid material vaporizes into a vapor;
a second chamber for receiving the vapor and the carrier gas from the first chamber and for providing a material flow sufficiently indirect to mix the vapor and the carrier gas into a substantially uniform vapor/carrier gas composition;
a third chamber for receiving the vapor and the carrier gas from the second chamber including a third chamber inlet located proximate to an outlet of the second chamber;
a third chamber outlet for providing the uniform vapor/carrier gas composition for deposition on a surface of a substrate, wherein the third chamber outlet is offset from the third chamber inlet such that the flow direction of the vapor/carrier gas must change while flowing from the third chamber inlet to the third chamber outlet; and
a conveyor for transporting the substrate proximate to the distributor assembly such that the vapor may be deposited from the third chamber on the substrate as a film.
14. The system of claim 13 , wherein the first chamber and the second chamber are tubular, and the first tubular chamber is disposed within the second tubular chamber such that the second tubular chamber sheaths the first tubular chamber.
15. The system of claim 13 , wherein the one or more first chamber walls comprise the heating element and are heated by resistive heating.
16. The system of claim 13 , wherein the heating element is capable of maintaining the first chamber at a temperature of at least 500 degrees C.
17. The system of claim 16 , wherein the heating element is capable of maintaining the first chamber at a temperature of at least 700 degrees C.
18. The system of claim 13 , wherein the second chamber comprises one or more distribution holes.
19. The system of claim 13 , wherein the third chamber is formed in a block, and comprises:
a passageway within the block connecting the third chamber inlet and the third chamber outlet.
20. The system of claim 14 , wherein the third chamber is tubular and forms a sheath around the second chamber.
21. The system of claim 19 , wherein the second chamber has an external surface, and the second chamber external surface and the third chamber outlet are configured such that the vapor/carrier gas is disbursed by the external surface of the second chamber after flowing from the third chamber outlet for deposition on the substrate.
22. The system of claim 21 , wherein the third chamber outlet comprises between about 10 to about 50 distribution holes.
23. The system of claim 19 , wherein the second chamber has an external surface and the block is at least partially surrounding the second chamber and configured to define a flow path between the block and the external surface of the second chamber and proximate to the third chamber outlet such that the flow direction of the vapor/carrier gas must change while flowing through the flow path for deposition on the surface of the substrate.