IP Library Granted Patent US 9,214,576
Granted Patent B2
US 9,214,576 · App. 13/155,112 · Granted Dec 15, 2015

Transparent conducting oxide for photovoltaic devices

Inventors: Jianming Fu (Palo Alto, CA); Zheng Xu (Pleasanton, CA); Jiunn Benjamin Heng (San Jose, CA); Chentao Yu (Sunnyvale, CA)
Assignee: SolarCity Corporation
H01L31/022466H01L31/02167H01L31/072H01L31/075H01L31/1804H01L31/1868Y02E10/547Y02E10/548
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Quick Facts
Patent No.
US 9,214,576
App. No.
13/155,112
Granted
Dec 15, 2015
Kind
B2
Abstract

One embodiment of the present invention provides a solar cell. The solar cell includes a Si base layer, a passivation layer situated above the Si base layer, a layer of heavily doped amorphous Si (a-Si) situated above the passivation layer, a first transparent-conducting-oxide (TCO) layer situated above the heavily doped a-Si layer, a back-side electrode situated below the Si base layer, and a front-side electrode situated above the first TCO layer. The first TCO layer comprises at least one of: GaInO, GaInSnO, ZnInO, and ZnInSnO.

Claims (40)

1. A solar cell, comprising:

a Si base layer;

a passivation layer positioned on a first side of the Si base layer;

a p type doped amorphous semiconductor layer positioned on the passivation layer;

a first transparent-conducting-oxide layer positioned on and in direct contact with the p-type doped amorphous semiconductor layer, wherein the first transparent-conducting-oxide layer has a work function that is between 4.9 eV and 6.1 eV, and wherein the first transparent-conducting-oxide layer comprises at least one of: GaInO, GaInSnO, and ZnInO;

a second transparent-conducting-oxide layer comprising indium-tin-oxide positioned on and in direct contact with the first transparent-conducting-oxide layer; and

a first metal grid positioned on a first side of the second transparent-conducting-oxide layer.

2. The solar cell of claim 1 , wherein the solar cell is configured to receive light from the first side of the Si base layer.

3. The solar cell of claim 1 , further comprising a second metal grid positioned on a second side of the Si base layer.

4. The solar cell of claim 3 , wherein the solar cell is configured to receive light from the second side of the Si base layer, and wherein the second metal grid comprises Ag, Cu, and/or Ni.

5. The solar cell of claim 1 , wherein the Si base layer includes a crystalline-Si substrate.

6. The solar cell of claim 1 , wherein the Si base layer includes an epitaxially formed crystalline-Si thin film.

7. The solar cell of claim 1 , wherein the passivation layer includes at least one of: undoped a-Si and SiO x .

8. The solar cell of claim 1 , wherein the p-type doped amorphous semiconductor layer has a doping concentration between 1×10 17 /cm 3 and 5×10 20 /cm 3 .

9. The solar cell of claim 1 , wherein the first metal grid comprises at least one of: Ag, Cu, and Ni.

10. The solar cell of claim 1 , wherein the p-type doped amorphous semiconductor comprises amorphous Si or amorphous Si containing carbon.

11. A method for fabricating a solar cell, comprising:

preparing a Si base layer;

depositing a first passivation layer on a first surface the Si base layer;

depositing a p-type doped amorphous semiconductor layer on the first passivation layer;

depositing a first transparent-conducting-oxide layer, wherein the first transparent-conducting-oxide layer comprises at least one of: GaInO, GaInSnO, and ZnInO; wherein the first transparent-conducting-oxide layer has a work function that is between 4.9 eV and 6.1 eV; and wherein the first transparent conducting-oxide layer is in direct contact with the p-type doped amorphous semiconductor layer;

depositing a second transparent-conducting-oxide layer, wherein the second transparent-conducting-oxide layer comprises indium-tin-oxide and is in direct contact with the first TCO layer; and

forming a first metal grid on a surface of the second transparent-conducting-oxide layer.

12. The method of claim 11 , further comprising:

depositing a second passivation layer on a second surface of the Si base layer;

depositing an n-type doped amorphous semiconductor layer on the second passivation layer;

depositing a third transparent-conducting-oxide layer on the n-type doped amorphous semiconductor layer; and

forming a second metal grid on the third transparent-conducting-oxide layer.

13. The method of claim 11 , wherein preparing the Si base layer involves texturing and cleaning a crystalline-Si substrate.

14. The method of claim 11 , wherein preparing the Si base layer involves epitaxially growing a crystalline-Si layer.

15. The method of claim 11 , wherein the first passivation layer includes at least one of: undoped a-Si and SiO x .

16. The method of claim 11 , wherein the p-type doped amorphous semiconductor layer has a doping concentration between 1×10 17 /cm 3 and 5×10 20 /cm 3 .

17. The method of claim 11 , wherein forming the first metal grid involves electroplating of a layer of Cu and/or a layer of Ni.

18. A solar cell, comprising:

a Si base layer;

a passivation layer positioned on a first side of the Si base layer;

a layer of p-type doped amorphous semiconductor positioned on the passivation layer;

a first transparent-conducting-oxide positioned on and in direct contact with the p-type doped amorphous semiconductor layer, wherein the first transparent-conducting-oxide layer has a work function that is between 4.9 eV and 6.1 eV, and wherein the first TCO layer comprises GaInO or GaInSnO

a second transparent-conducting-oxide layer comprising indium-tin-oxide positioned on and in direct contact with the first transparent-conducting-oxide layer; and

a first metal grid positioned on the second transparent-conducting-oxide layer.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 6, 2021
From: SOLARCITY CORPORATION
To: TESLA, INC.
Reel/Frame 056172/0062 →
MERGER AND CHANGE OF NAME Recorded Mar 3, 2016
From: SILEVO, INC.; SUNFLOWER ACQUISITION LLC
To: SILEVO, LLC
Reel/Frame 037888/0308 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 4, 2015
From: SILEVO LLC
To: SOLARCITY CORPORATION
Reel/Frame 035559/0179 →
CHANGE OF NAME Recorded Sep 26, 2011
From: SIERRA SOLAR POWER, INC.
To: SILEVO, INC.
Reel/Frame 026978/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 8, 2011
From: FU, JIANMING; XU, ZHENG; HENG, JIUNN BENJAMIN; YU, CHENTAO
To: SIERRA SOLAR POWER, INC.
Reel/Frame 026714/0739 →
Continuity (2)
Provisional Application 61353119 · Jun 9, 2010
Related Publication 20110303278A1 · Dec 15, 2011