Impulse actuated MEMS devices
View Patent ↗An apparatus, useful in, for example, a miniature camera, includes an object, e.g., an optical element such as a shutter blade, an actuator operable to apply an impulse to the object such that the object moves from a first position to a second position, and at least one flexure coupled to the object and operable to confine movement of the object to movement along a predefined trajectory extending between the first and second positions.
1. An apparatus, comprising:
an object;
an actuator operable to apply a single impulse directly to the object such that the object moves from a first position to a second position; and
at least one flexure coupled to the object and operable to confine movement of the object to movement along a predefined trajectory extending between the first and second positions.
2. The apparatus of claim 1 , wherein the at least one flexure is coupled to a supporting structure by a solid resilient hinge.
3. The apparatus of claim 2 , wherein at least two of the object, the at least one flexure and/or the supporting structure are made integrally with each other from a substrate by micromachining.
4. The apparatus of claim 3 , wherein the substrate comprises silicon.
5. The apparatus of claim 1 , wherein the object comprises an optical element.
6. The apparatus of claim 5 , wherein the optical element comprises a shutter blade.
7. A camera, comprising:
a housing having an aperture configured to admit light into the housing along an optical axis;
an optical element supported by at least one flexure to move between first and second positions and along a predefined trajectory intersecting the optical axis in response to a single impulse imparted directly to the optical element; and
an actuator selectably operable to impart the impulse to the optical element.
8. The camera of claim 7 , wherein the predetermined trajectory is one or more of generally planar, generally arcuate, and/or generally rectilinear.
9. The camera of claim 7 , wherein the first position coincides with the optical axis.
10. The camera of claim 7 , wherein the second position coincides with the optical axis.
11. The camera of claim 7 , wherein the optical element comprises a shutter blade.
12. The camera of claim 7 , wherein the at least one flexure is operable to return the optical element from the second position to the first position.
13. A method, comprising:
providing a substrate; and
forming an object supported by at least one flexure pivotally connected to a supporting structure by at least one solid resilient hinge in the substrate,
wherein the at least one flexure is configured to confine movement of the object to a substantially planar, arcuate trajectory in response to a single impulse imparted directly to the object by an actuator.
14. The method of claim 13 , wherein the substrate comprises silicon.
15. The method of claim 13 , wherein the forming comprises micro-machining.
16. The method of claim 13 , wherein the forming comprises photolithography.
17. The method of claim 13 , wherein the object, the at least one flexure and the supporting structure are formed integrally with each other.
18. The method of claim 13 , wherein the object comprises an optical element.
19. The method of claim 18 , wherein the optical element comprises a shutter blade.
20. The method of claim 13 , wherein the at least one flexure is further configured to return the object to an initial position after the object has been displaced therefrom.