Method of transferring graphene
View Patent ↗A method of transferring graphene, the method including: preparing a graphene forming structure including a base member, an oxide layer that is hydrophilic and is formed on the base member, a metal catalyst layer that is hydrophobic and is formed on the oxide layer, and graphene that is formed on the metal catalyst layer; attaching the graphene forming structure on a surface of a first carrier; separating the oxide layer from the metal catalyst layer by applying steam to the graphene forming structure; and removing the metal catalyst layer.
1. A method of transferring graphene, the method comprising:
preparing a graphene forming structure comprising a base member, an oxide layer that is hydrophilic and is formed on the base member, a metal catalyst layer that is hydrophobic and is formed on the oxide layer, and graphene that is formed on the metal catalyst layer;
attaching the graphene forming structure on a surface of a first carrier;
separating the oxide layer from the metal catalyst layer by applying steam to the graphene forming structure; and
removing the metal catalyst layer.
2. The method of claim 1 , wherein the base member comprises silicon (Si), and the oxide layer is formed of silicon dioxide (SiO 2 ).
3. The method of claim 1 , wherein the attaching the graphene forming structure on the surface of the first carrier comprises attaching the graphene on the surface of the first carrier.
4. The method of claim 1 , wherein the metal catalyst layer comprises at least one of nickel (Ni), copper (Cu), aluminum (Al), iron (Fe), cobalt (Co) and tungsten (W).
5. The method of claim 1 , wherein the first carrier is formed of a flexible material and is partly wound around a roll, whereby the first carrier is transported by roll-to-roll processing.
6. The method of claim 1 , wherein the first carrier is formed of a thermal release tape having at least one adhesive surface formed thereon.
7. The method of claim 6 , further comprising:
after the removing the metal catalyst layer, attaching the graphene on a second carrier;
separating the graphene from the first carrier by applying heat to the first carrier; and
transferring the graphene to the second carrier.
8. The method of claim 1 , wherein the attaching the graphene forming structure on the surface of the first carrier comprises attaching the graphene forming structure on the first carrier by pushing an adhesive surface of the first carrier toward the graphene.
9. The method of claim 8 , wherein, in order to push the adhesive surface of the first carrier toward the graphene, the attaching the graphene forming structure on the surface of the first carrier comprises injecting pressurized air toward a surface opposite to the adhesive surface among surfaces of the first carrier.
10. The method of claim 1 , wherein the separating comprises injecting pressurized air to the graphene forming structure along with the steam.
11. The method of claim 10 , wherein the pressurized air is injected by an air knife device.
12. The method of claim 1 , further comprising, between the separating the oxide layer from the metal catalyst layer and the removing the metal catalyst layer, forming an etching resist on the metal catalyst layer, wherein the etching resist has a predetermined pattern.
13. The method of claim 1 , further comprising:
moving the first carrier, on the surface of which the graphene forming structure is attached, in a first direction after the graphene forming structure is attached on the first carrier; and
changing the direction of the moving the first carrier when the separating begins so that the oxide layer and the base member moves in the first direction, and the metal catalyst layer and the graphene along with the first carrier moves in a second direction,
wherein, in the separating the oxide layer from the metal catalyst layer, the steam is applied to a front edge of the graphene forming structure.
14. The method of claim 13 , further comprising:
attaching a device to the base member before the separating the oxide layer from the metal catalyst layer; and
moving the device in the first direction at a same speed as a speed of the moving the first carrier.
15. The method of claim 14 , wherein the separating the oxide layer from the metal catalyst layer begins at the front edge of the graphene forming structure while a rear portion of the graphene forming structure is being attached on the first carrier in the attaching.
16. The method of claim 1 , wherein the oxide layer and the base member separated from the metal catalyst layer via the separating the oxide layer from the metal catalyst layer are transported to be distant from the first carrier.
17. The method of claim 1 , wherein the removing the metal catalyst layer comprises an etching process that is performed using an etching solution comprising at least one of acid, hydrogen fluoride (HF), buffered oxide etch (BOE), a FeC 1 3 solution and a Fe(NO 3 ) 3 solution.
18. The method of claim 1 , further comprising:
after the removing the metal catalyst layer, attaching the graphene on a second carrier;
separating the graphene from the first carrier; and
transferring the graphene to the second carrier.
19. The method of claim 1 , further comprising, after the removing the metal catalyst layer, removing a portion of the graphene.
20. The method of claim 1 , further comprising moving the first carrier, on which the graphene forming structure is attached, in a first direction after the graphene forming structure is attached on the first carrier,
wherein the separating the oxide layer from the metal catalyst layer is performed while the first carrier is moved.