Electron microscope device

1. An electron microscope device, comprising a scanning electron microscope and an optical microscope, wherein said scanning electron microscope has a scanner and an electron detector for detecting electrons issued from a specimen scanned over by an electron beam, and said scanning electron microscope acquires a scanning electron image based on a detection result from said electron detector, and said optical microscope has a light emitting source for illuminating an illumination light, and said optical microscope illuminates said illumination light to said specimen, and acquires an optical image by receiving a reflection light from said specimen, and wherein said electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter having a transmission wavelength range and a non-transmission wavelength range for restricting so that all or almost all of wavelength ranges of the fluorescent light from said fluorescent substance layer passes through, and a wavelength detecting element for receiving said fluorescent light passing through said wavelength filter and performing optical-electric conversion, wherein said illumination light includes a wavelength range that passes through said wavelength filter and wherein the light amount of said wavelength range does not exceed a limit of deterioration of said scanning electron image, thereby allowing simultaneous use of said illumination light and said electron beam, wherein said light emitting source is an LED, and said LED has a light emission property wherein light intensity of a frequency spectrum included in the transmission wavelength range of said wavelength filter is lower than light intensity of a frequency spectrum included in said non-transmission wavelength range.

2. The electron microscope device according to claim 1 , further comprising an interferometer for projecting an interference light to a surface of said specimen and for detecting a position in height direction of said specimen by using reflection of said interference light from the surface of said specimen, wherein said interference light has a wavelength different from the transmission wavelength range of said wavelength filter.

3. The electron microscope device according to claim 1 , further comprising a foreign object detecting device comprising an examination light which is projected toward a surface of said specimen, and an interferometer for projecting an interference light to the surface of said specimen and for detecting a position in height direction of said specimen by using reflection of said interference light from the surface of said specimen, wherein said examination light and said interference light have wavelengths different from the transmission wavelength range of said wavelength filter, and said examination light and said interference light have wavelength ranges different from each other.

4. An electron microscope device, comprising a scanning electron microscope and an optical microscope, wherein said scanning electron microscope has a scanner and an electron detector for detecting electrons issued from a specimen scanned over by an electron beam, and said scanning electron microscope acquires a scanning electron image based on a detection result from said electron detector, and said optical microscope has a light emitting source for illuminating an illumination light, and said optical microscope illuminates said illumination light to said specimen, and acquires an optical image by receiving a reflection light from said specimen, and wherein said electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter having a transmission wavelength range and a non-transmission wavelength range for restricting so that all or almost all of wavelength ranges of the fluorescent light from said fluorescent substance layer passes through, and a wavelength detecting element for receiving said fluorescent light passing through said wavelength filter and performing optical-electric conversion, wherein said illumination light includes a wavelength range that passes through said wavelength filter and wherein the light amount of said wavelength range does not exceed a limit of deterioration of said scanning electron image, thereby allowing simultaneous use of said illumination light and said electron beam, wherein an illumination light optical system of said optical microscope has a wavelength selective filter for illumination, said light emitting source illuminates said illumination light including a wavelength of a visible light range, and said wavelength selective filter for illumination restricts transmissivity of a wavelength corresponding to the transmission wavelength range of said wavelength filter and allows a wavelength corresponding to the non-transmission wavelength range of said wavelength filter to pass.

5. An electron microscope device, comprising a scanning electron microscope and an optical microscope, wherein said scanning electron microscope has a scanner and an electron detector for detecting electrons issued from a specimen scanned over by an electron beam, and said scanning electron microscope acquires a scanning electron image based on a detection result from said electron detector, and said optical microscope has a light emitting source for illuminating an illumination light, and said optical microscope illuminates said illumination light to said specimen, and acquires an optical image by receiving a reflection light from said specimen, and wherein said electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter having a transmission wavelength range and a non-transmission wavelength range for restricting so that all or almost all of wavelength ranges of the fluorescent light from said fluorescent substance layer passes through, and a wavelength detecting element for receiving said fluorescent light passing through said wavelength filter and performing optical-electric conversion, wherein said illumination light includes a wavelength range that passes through said wavelength filter and wherein the light amount of said wavelength range does not exceed a limit of deterioration of said scanning electron image, thereby allowing simultaneous use of said illumination light and said electron beam, wherein an illumination light optical system of said optical microscope has a wavelength selective filter for illumination, said light emitting source is an LED, and said wavelength selective filter for illumination restricts transmissivity of a wavelength corresponding to the transmission wavelength range of said wavelength filter and allows a wavelength corresponding to the non-transmission wavelength range of said wavelength filter to pass.

6. The electron microscope device according to claim 5 , wherein said light emitting source is an LED, and said LED has a light emission property wherein light amount of the transmission wavelength range of said wavelength filter is higher than light amount of the non-transmission wavelength range.

7. The electron microscope device according to claim 5 , comprising a control unit, wherein said control unit amplifies and adjusts a color tone with respect to a wavelength band passing through said wavelength selective filter for illumination among wavelength ranges of optical images acquired by said optical microscope.

8. The electron microscope device according to claim 1 , further comprising a foreign object detecting device, comprising an examination light which is projected toward a surface of said specimen, wherein said examination light is designed to have a wavelength different from the transmission wavelength range of said wavelength filter.