Mask and method of manufacturing array substrate using the same
View Patent ↗A mask includes: a substrate that includes a central area and a peripheral area disposed around the central area; and lenses disposed in rows and columns, in the central area and the peripheral area. The lenses of opposing sides of the peripheral area may be disposed in different rows or columns. For a given amount of input light, the lenses of the peripheral area may focus less light on a substrate than the lenses of the central area. The mask may be disposed over the substrate in different positions, and then the substrate may be irradiated through the mask, while the mask is in each of the positions. The peripheral portion of the mask may be disposed over the same area of the substrate, while the mask is in different ones of the positions.
1. A mask comprising:
a substrate comprising a central area and a peripheral area disposed around the central area, the peripheral area comprising opposing first and second sides, and opposing third and fourth sides extending between the first and second sides; and
lenses disposed in rows and columns in the central area and in the first, second, third sides of the peripheral area; wherein,
the lenses of the first side of the peripheral area are disposed in different ones of the rows than the lenses of the second side of the peripheral area, and
the lenses of the third side of the peripheral area are disposed in different ones of the columns than the lenses of the fourth side of the peripheral area.
2. The mask of claim 1 , further comprising a lens disposed in a corner of the peripheral area that is disposed between the first side and the third side.
3. The mask of claim 1 , further comprising a light-blocking layer disposed on the substrate and between the lenses.
4. The mask of claim 3 , when the lenses of the peripheral area are arranged in an irregular pattern.
5. The mask of claim 1 , wherein in the peripheral area:
the lenses of the first side are disposed in one column;
the lenses of the second side are disposed in one column;
the lenses of the third side are disposed in one row; and
the lenses of the fourth side are disposed in one row.
6. The mask of claim 1 , wherein in the peripheral area:
the lenses of the first side are disposed in at least two columns;
the lenses of the second side are disposed in at least two columns;
the lenses of the third side are disposed in at least two rows; and
the lenses of the fourth side are disposed in at least two rows.
7. A mask comprising:
a substrate comprising a central area and a peripheral area disposed around the central area;
first lenses disposed in rows and columns in the central area, to focus light onto a semiconductor layer; and
second lenses disposed in the peripheral area and in the rows and the columns, to focus light onto the semiconductor layer,
wherein for an equal amount of input light, the light focused by the second lenses has a lower intensity than the light focused by the first lenses.
8. The mask of claim 7 , further comprising second lenses disposed in two corners of the peripheral area.
9. The mask of claim 8 , wherein the second lenses are partially covered by a light-blocking layer.
10. The mask of claim 8 , wherein the second lenses are half-tone lenses.
11. The mask of claim 7 , further comprising a light-blocking layer disposed on the substrate between the first lenses and the second lenses,
wherein the light-blocking layer partially covers the second lenses.
12. The mask of claim 7 , wherein the second lenses are disposed in two rows or two columns, on each side of the central area.