Semiconductor memory device
View Patent ↗The demand for reducing the size and increasing the degree of integration of semiconductor memory devices has increased. In a semiconductor memory device, a smoothing capacitor which has to be provided therein for stabilizing a power supply voltage etc. is formed in an underlying layer of memory cells A and B to overlap the two memory cells A and B which are adjacent each other. Thus, an area occupied by the smoothing capacitor having a large capacity can be reduced to increase the degree of integration, and the smoothing capacitor having a large capacity can be provided in the semiconductor memory device.
1. A semiconductor memory device, comprising:
a plurality of bit lines arranged in a column direction;
a plurality of word lines arranged in a row direction; and
a memory cell array including a plurality of memory cells which are arranged at intersections of the bit lines and the word lines, each memory cell including a selective element and a first capacitive element connected in series between an associated one of the bit lines and a plate interconnect, the selective element having a control terminal connected to an associated one of the word lines,
wherein in an underlying layer of the first capacitive element, a second capacitive element is provided to overlap two or more of the memory cells, and
the selective element is a first MOS transistor, and the second capacitive element is a second MOS transistor.
2. The semiconductor memory device of claim 1 , wherein respective lengths of short sides and long sides of an electrode of the first capacitive element connected to the selective element are different from each other.
3. The semiconductor memory device of claim 1 , further comprising:
a dummy memory cell array which is not used as a memory element and provided near the memory cell array,
wherein a bit line of the dummy memory cell array and a terminal of the second capacitive element are connected together.
4. The semiconductor memory device of claim 1 , wherein a thickness of a gate oxide film of the first MOS transistor is different from a thickness of a gate oxide film of the second MOS transistor.
5. The semiconductor memory device of claim 1 , wherein a direction in which a source and a drain of the first MOS transistor are arranged is different from a direction in which a source and a drain of the second MOS transistor are arranged.
6. The semiconductor memory device of claim 1 , wherein the first and second MOS transistors are NMOS transistors.
7. The semiconductor memory device of claim 1 , wherein the control terminal of the first MOS transistor is a gate electrode.
8. The semiconductor memory device of claim 1 , wherein a voltage of a first terminal of the second capacitive element is a power supply voltage, and a voltage of a second terminal of the second capacitive element is ground potential.
9. The semiconductor memory device of claim 1 , wherein a voltage of a first terminal of the second capacitive element is a power supply voltage for driving the word lines, and a voltage of a second terminal of the second capacitive element is ground potential.
10. The semiconductor memory device of claim 1 , wherein a voltage of a first terminal of the second capacitive element is a power supply voltage of an internal power supply circuit provided in a peripheral circuit section, and a voltage of a second terminal of the second capacitive element is ground potential.
11. The semiconductor memory device of claim 1 , wherein the first capacitive element is a ferroelectric capacitor.
12. The semiconductor memory device of claim 1 , wherein the plurality of bit lines are arranged below the first capacitive elements.
13. The semiconductor memory device of claim 1 , wherein the plurality of bit lines are arranged above the first capacitive elements.
14. The semiconductor memory device of claim 1 , wherein
the plurality of memory cells include a first memory cell and a second memory cell,
the selective element of the first memory cell includes a first doped region to which the first capacitive element of the first memory cell is connected and a second doped region connected to an associated one of the bit lines,
the selective element of the second memory cell includes a third doped region to which the first capacitive element of the second memory cell is connected, and a fourth doped region connected to an associated one of the bit lines,
a gate electrode of the selective element of the first memory cell and a gate electrode of the selective element of the second memory cell are connected to different word lines, and
the second capacitive element is arranged between the first doped region and the third doped region.
15. A semiconductor memory device, comprising:
a plurality of bit lines arranged in a column direction;
a plurality of word lines arranged in a row direction;
a memory cell array including a plurality of memory cells which are arranged at intersections of the bit lines and the word lines, each memory cell including a selective element and a first capacitive element connected in series between an associated one of the bit lines and a plate interconnect, the selective element having a control terminal connected to an associated one of the word lines; and
a dummy memory cell array which is not used as a memory element and provided near the memory cell array,
wherein in an underlying layer of the first capacitive element, a second capacitive element is provided to overlap two or more of the memory cells, and
a bit line of the dummy memory cell array and a terminal of the second capacitive element are connected together.
16. A semiconductor memory device, comprising:
a plurality of bit lines arranged in a column direction;
a plurality of word lines arranged in a row direction; and
a memory cell array including a plurality of memory cells which are arranged at intersections of the bit lines and the word lines, each memory cell including a selective element and a first capacitive element connected in series between an associated one of the bit lines and a plate interconnect, the selective element having a control terminal connected to an associated one of the word lines,
wherein in an underlying layer of the first capacitive element, a second capacitive element is provided to overlap two or more of the memory cells, and
a voltage of a first terminal of the second capacitive element is a power supply voltage, and a voltage of a second terminal of the second capacitive element is ground potential.
17. The semiconductor memory device of claim 16 , wherein the power supply voltage is a power supply voltage for driving the word lines.
18. The semiconductor memory device of claim 16 , wherein the power supply voltage is a power supply voltage of an internal power supply circuit provided in a peripheral circuit section.
19. The semiconductor memory device of claim 16 , wherein respective lengths of short sides and long sides of an electrode of the first capacitive element connected to the selective element are different from each other.
20. The semiconductor memory device of claim 16 , wherein the first capacitive element is a ferroelectric capacitor.