Glass substrate for semiconductor device component and process for producing glass substrate for semiconductor device component
View Patent ↗It is an object of the present invention to provide a glass substrate having plural through-holes which is not likely to peel from a silicon wafer, even though laminated on and jointed to a the silicon wafer and then subjected to heat treatment. The above object is accomplished by a glass substrate having an average thermal expansion coefficient of from 10×10 −7 to 50×10 −7 /K within a range of from 50° C. to 300° C., having plural through-holes with a taper angle of from 0.1 to 20° and having a thickness of from 0.01 to 5 mm.
1. A glass substrate for a semiconductor device component, which is a glass plate having a thickness of from 0.01 to 5 mm, an SiO 2 content of from 50 to 70 mass %, an Fe content of from 20 mass ppm to 0.1 mass % and an average thermal expansion coefficient of from 10×10 −7 to 50×10 −7 /K within a range of from 50° C. to 300° C., wherein the glass plate has plural through-holes with a taper angle of from 0.1 to 20°.
2. The glass substrate for a semiconductor device component according to claim 1 , wherein the through-holes have a diameter of from 5 to 500 μm.
3. The glass substrate for a semiconductor device component according to claim 1 , wherein the through-holes have a number density of from 1 to 10,000/mm 2 .
4. The glass substrate for a semiconductor device component according to claim 1 , which has an SiO 2 content of from 50 to 70 mass % and the total content of Na and Ka of at most 3.5 mass % as calculated as oxides.
5. A process for producing the glass substrate for a semiconductor device component as defined in claim 1 by emitting excimer laser light to a plate glass, which comprises the following steps (1) to (6):
(1) a first step of placing an excimer laser light-emitting device,
(2) a second step of placing the plate glass on an optical path of the excimer laser light,
(3) a third step of placing a mask having plural through-holes on the optical path between the excimer laser light-emitting device and the plate glass,
(4) a fourth step of placing a projection lens on the optical path between the mask and the plate glass to reduction-project the image of the mask on the plate glass,
(5) a fifth step of emitting the excimer laser light, and
(6) a sixth step of transferring the plate glass.
6. The process for producing the glass substrate for a semiconductor device component according to claim 5 , wherein the fifth step is a step of emitting the excimer laser light having irradiation fluence of from 2 to 20 J/cm 2 so that the product of the irradiation fluence (J/cm 2 ), the number of shots (times) and the thickness of the plate glass (mm) becomes from 1,000 to 3,000.
7. The process for producing the glass substrate for a semiconductor device component according to claim 5 , wherein the fifth step is a step of further controlling the irradiation fluence to control a taper angle of the through-holes.
8. The process for producing the glass substrate for a semiconductor device component according to claim 5 , wherein the excimer laser light at the fifth step is KrF laser, ArF laser or F 2 laser.
9. A process for producing a glass substrate for a semiconductor device component, which comprises passing excimer laser light emitted from an excimer laser light-emitting device through a mask having plural through-holes and having the image of the mask reduction-projected by a projection lens, and irradiating a surface of a plate glass substrate having a thickness of from 0.01 to 5 mm, an SiO 2 content of from 50 to 70 mass %, a Fe content of from 20 mass ppm to 0.1 mass % and an average thermal expansion coefficient of from 10×10 −7 /K to 50×10 −7 /K within a range of from 50° C. to 300° C. with the reduction-projected excimer laser light so as to form through-holes corresponding to the through-holes of the mask in the plate glass substrate.
10. The process for producing the glass substrate for a semiconductor device component according to claim 9 , wherein the excimer laser light having irradiation fluence of from 2 to 20 J/cm 2 is emitted so that the product of the irradiation fluence (J/cm 2 ), the number of shots (times) and the thickness of the plate glass (mm) becomes from 1,000 to 30,000.
11. The process for producing the glass substrate for a semiconductor device component according to claim 9 , wherein the irradiation fluence is controlled to control a taper angle of the through-holes.
12. The process for producing the glass substrate for a semiconductor device component according to claim 10 , wherein the excimer laser light is KrF laser, ArF laser or F 2 laser.