Thin film transistor array panel and display device including the same, and manufacturing method thereof
View Patent ↗A thin film transistor array panel includes a source electrode and a drain electrode on an insulating substrate, an oxide semiconductor on the insulating substrate and overlapping the source electrode and the drain electrode, a passivation layer overlapping the oxide semiconductor and on the insulating substrate, a gate electrode on the passivation layer, and a pixel electrode connected to the drain electrode. The gate electrode and the pixel electrode include a same material. The oxide semiconductor is between the source electrode and the gate electrode, and between the drain electrode and the gate electrode in a cross-sectional view of the thin film transistor array panel.
1. A thin film transistor array panel comprising:
a source electrode and a drain electrode on an insulating substrate;
an oxide semiconductor disposed on the source electrode and the drain electrode;
a passivation layer which covers the oxide semiconductor and the insulating substrate;
a gate electrode disposed on the passivation lyer; and
a pixel electrode connected to the drain electrode,
wherein the gate electrode and pixel electrode are in a same single layer.
2. The thin film transistor array panel of claim 1 , further comprising:
a barrier layer disposed between the insulating substrate and the source electrode and the drain electrode.
3. The thin film transistor array panel of claim 2 , wherein:
the barrier layer includes silicon oxide (SiOx).
4. The thin film transistor array panel of claim 2 , wherein:
the source electrode and the drain electrode are each a dual-layer structure which includes a lower layer and an upper layer.
5. The thin film transistor array panel of claim 4 , wherein:
the lower layer comprises an opaque metal including one of aluminum (Al), molybdenum (Mo), copper (Cu), mercury (Ag), chromium (Cr), tungsten (W), niobium (Nb), titanium (Ti) and tantalum (Ta), and
the upper layer comprises a transparent conducting oxide including one of an oxide of indium (In), zinc (Zn), tin (Sn), aluminum (Al) and gallium (Ga).
6. The thin film transistor array panel of claim 4 , wherein:
the passivation layer includes a contact hole which exposes a portion of the drain electrode, and
the pixel electrode is connected to the drain electrode through the contact hole.
7. The thin film transistor array panel of claim 6 , further comprising:
an insulating layer pattern disposed on the oxide semiconductor, and having a same plane shape as the oxide semiconductor.
8. The thin film transistor array panel of claim 1 , wherein:
the source electrode and the drain electrode are each a dual-layer structure which includes a lower layer and an upper layer.
9. The thin film transistor array panel of claim 8 , wherein:
the lower layer comprises an opaque metal including one of aluminum (Al), molybdenum (Mo), copper (Cu), mercury (Ag), chromium (Cr), tungsten (W), niobium (Nb), titanium (Ti) and tantalum (Ta), and
the upper layer comprises a transparent conducting oxide including one of an oxide of indium (In), zinc (Zn), tin (Sn), aluminum (Al) and gallium (Ga).
10. The thin film transistor array panel of claim 8 , wherein:
the passivation layer includes a contact hole which exposes a portion of the drain electrode; and
the pixel electrode is connected to the drain electrode through the contact hole.
11. The thin film transistor array panel of claim 8 , further comprising:
an insulating layer pattern disposed on the oxide semiconductor, and having a same plane shape as the oxide semiconductor.
12. The thin film transistor array panel of claim 1 , wherein:
the passivation layer includes a contact hole which exposes a portion of the drain electrode; and
the pixel electrode is connected to the drain electrode through the contact hole.
13. The thin film transistor array panel of claim 1 , further comprising:
an insulating layer pattern disposed on the oxide semiconductor, and having a same plane shape as the oxide semiconductor.
14. A display device comprising:
a first display panel which includes:
a source electrode and a drain electrode on a first insulating substrate;
an oxide semiconductor on the source electrode and the drain electrode;
a passivation layer which covers the oxide semiconductor and the first insulating substrate;
a gate electrode on the passivation layer; and
a pixel electrode connected to the drain electrode, and in a same single layer as the gate electrode;
a second display panel facing the first display panel, and including a common electrode on a second insulating substrate; and
a liquid crystal layer between the first display panel and the second display panel.
15. The display device of claim 14 , wherein the first display panel further includes:
a barrier layer disposed between the insulating substrate and the source electrode and the drain electrode.
16. The display device of claim 15 , wherein:
the barrier layer includes silicon oxide (SiOx).
17. The display device of claim 15 , wherein:
the source electrode and the drain electrode are each a dual-layer structure which includes a lower layer and an upper layer.
18. The display device of claim 17 , wherein:
the lower layer comprises an opaque metal including one of aluminum (Al), molybdenum (Mo), copper (Cu), mercury (Ag), chromium (Cr), tungsten (W), niobium (Nb), titanium (Ti) and tantalum (Ta), and
the upper layer comprises a transparent conducting oxide including one of an oxide of indium (In), zinc (Zn), tin (Sn), aluminum (Al) and gallium (Ga).
19. The display device of claim 17 , wherein:
the passivation layer includes a contact hole which exposes a portion of the drain electrode, and
the pixel electrode is connected to the drain electrode through the contact hole.
20. The display device of claim 17 , further comprising:
an insulating layer pattern on the oxide semiconductor and having a same plane shape as the oxide semiconductor.
21. The display device of claim 14 , wherein:
the source electrode and drain electrode are each a dual-layer structure which includes a lower layer and an upper layer.
22. The display device of claim 21 , wherein:
the lower layer comprises an opaque metal including one of aluminum (Al), molybdenum (Mo), copper (Cu), mercury (Ag), chromium (Cr), tungsten (W), niobium (Nb), titanium (Ti) and tantalum (Ta), and
the upper layer comprises a transparent conducting oxide including one of an oxide of indium (In), zinc (Zn), tin (Sn), aluminum (Al) and gallium (Ga).
23. The display device of claim 21 , wherein:
the passivation layer includes a contact hole which exposes a portion of the drain electrode, and
the pixel electrode is connected to the drain electrode through the contact hole.
24. The display device of claim 21 , further comprising:
an insulating layer pattern disposed on the oxide semiconductor, and having a same plane shape as the oxide semiconductor.
25. The display device of claim 14 , wherein:
the passivation layer includes a contact hole which exposes a portion of the drain electrode, and
the pixel electrode is connected to the drain electrode through the contact hole.
26. The display device of claim 14 , further comprising:
an insulating layer pattern disposed on the oxide semiconductor, and having a same plane shape as the oxide semiconductor.
27. A display device comprising:
a first display panel which includes:
a source electrode and a drain electrode on a first insulating substrate;
an oxide semiconductor on the source electrode and the drain electrode;
a passivation layer covers the oxide semiconductor and the first insulating substrate;
a gate electrode on the passivation layer; and
a pixel electrode connected to the drain electrode, and in a same single layer as the gate electrode;
a second display panel facing the first display panel, and including a common electrode on a second insulating substrate; and
an electrophoretic member between the first display panel and the second display panel, and including a first electrophoretic particle and a second electrophoretic particle having different charges.
28. The display device of claim 27 , wherein the first display panel further includes:
a barrier layer disposed between the insulating substrate and the source electrode and the drain electrode.
29. The display device of claim 28 , wherein:
the barrier layer includes silicon oxide (SiOx).
30. The display device of claim 28 , wherein:
the source electrode and the drain electrode are each a dual-layer structure which includes a lower layer and an upper layer.
31. The display device of claim 30 , wherein:
the lower layer comprises an opaque metal including one of aluminum (Al), molybdenum (Mo), copper (Cu), mercury (Ag), chromium (Cr), tungsten (W), niobium (Nb), titanium (Ti) and tantalum (Ta), and
the upper layer comprises a transparent conducting oxide including one of an oxide of indium (In), zinc (Zn), tin (Sn), aluminum (Al) and gallium (Ga).
32. The display device of claim 30 , wherein:
the passivation layer includes a contact hole which exposes a portion of the drain electrode, and
the pixel electrode is connected to the drain electrode through the contact hole.
33. The display device of claim 30 , further comprising:
an insulating layer pattern disposed on the oxide semiconductor, and having a same plane shape as the oxide semiconductor.
34. The display device of claim 27 , wherein:
the source electrode and the drain electrode are each a dual-layer structure which includes a lower layer and an upper layer.
35. The display device of claim 34 , wherein:
the lower layer comprises an opaque metal including one of aluminum (Al), molybdenum (Mo), copper (Cu), mercury (Ag), chromium (Cr), tungsten (W), niobium (Nb), titanium (Ti) and tantalum (Ta), and
the upper layer comprises a transparent conducting oxide including one of an oxide of indium (In), zinc (Zn), tin (Sn), aluminum (Al) and gallium (Ga).
36. The display device of claim 34 , wherein:
the passivation layer includes a contact hole which exposes a portion of the drain electrode, and
the pixel electrode is connected to the drain electrode through the contact hole.
37. The display device of claim 34 , further comprising:
an insulating layer pattern disposed on the oxide semiconductor, and having a same plane shape as the oxide semiconductor.
38. The display device of claim 27 , wherein:
the passivation layer including a contact hole which exposes a portion of the drain electrode, and
the pixel electrode is connected to the drain electrode through the contact hole.
39. The display device of claim 27 , further comprising:
an insulating layer pattern disposed on the oxide semiconductor, and having a same plane shape as the oxide semiconductor.