Organic light-emitting display device and method of manufacturing the same
View Patent ↗An organic light-emitting display device includes a pixel electrode and a pixel defining layer which are formed by using one mask process. A method for manufacturing the display includes thermally reflowing a remaining portion of a photo-sensitive organic film that is used as a mask to form the pixel electrode to be the pixel defining layer.
1. A method of manufacturing an organic light-emitting display device, the method comprising:
(a) sequentially forming a pixel electrode layer and a photo-sensitive organic film;
(b) preparing a mask comprising a first transmission portion, a second transmission portion, and a third transmission portion which have different light transmission rates from each other;
(c) positioning the mask on the photo-sensitive organic film such that the first transmission portion corresponds to a portion of the pixel electrode layer that is to be a pixel electrode, the second transmission portion corresponds to a portion of the pixel electrode layer that is to be removed, and the third transmission portion corresponds to a portion of the photo-sensitive organic film that is to be a pixel defining layer at an edge of the pixel electrode;
(d) selectively exposing and removing the photo-sensitive organic film such that the pixel electrode layer is exposed and the portion of the photo-sensitive organic film that is to be the pixel defining layer remains; and
(e) thermally reflowing a remaining portion of the photo-sensitive organic film that is to be the pixel defining layer such that the photo-sensitive organic film reflows to cover the edge of the pixel electrode.
2. The method of claim 1 , wherein the operation (d) comprises:
removing the photo-sensitive organic film such that a portion of the photo-sensitive organic film corresponding to the portion of the pixel electrode layer that is to be removed is removed, a portion of the photo-sensitive organic film corresponding to the portion of the pixel electrode layer that is to be the pixel electrode remains with a first thickness, and the portion of the photo-sensitive organic film that is to be the pixel defining layer remains with a second thickness larger than the first thickness;
etching the portion of the pixel electrode layer corresponding to a removed portion of the photo-sensitive organic film; and
removing the portion of the photo-sensitive organic film corresponding to the portion of the pixel electrode layer that is to be the pixel electrode, so as to expose the pixel electrode, except the portion of the photo-sensitive organic film that is to be the pixel defining layer.
3. The method of claim 1 , wherein the photo-sensitive organic film comprises an olefin-based organic film, an acryl-based organic film, or an imide-based organic film.
4. A method of manufacturing an organic light-emitting display device, the method comprising:
forming a photo-sensitive organic film on a pixel electrode layer;
selectively exposing and removing the photo-sensitive organic film such that a portion of the pixel electrode layer is exposed and removed to form a pixel electrode with a remaining portion of the photo-sensitive organic film thereon, a first portion of the remaining portion being at an edge of the pixel electrode and having a thickness larger than other portions of the remaining portion;
removing the other portions of the remaining portion; and
thermally reflowing the first portion of the remaining portion to cover an edge of the pixel electrode.
5. The method of claim 4 , wherein the photo-sensitive organic film comprises an olefin-based organic film, an acryl-based organic film, or an imide-based organic film.