PRESSURE MEASURING DEVICE
Provision of a pressure measuring device having a flexible membrane that receives the pressure; a pedestal, provided with a raised portion having a bottom face that is circular that supports the flexible membrane; and a supporting member that is bonded to the circular bottom face of the raised portion. The flexible membrane is made out of, for example, silicon, and has the (100) face as the primary face. Moreover, the flexible membrane is provided held between a silicon substrate, which is provided with a recessed portion, and a silicon substrate, which is provided with a recessed portion. Because of this, the flexible membrane is held on the pedestal with the silicon substrate interposed therebetween.
1 . A pressure measuring device comprising:
a flexible membrane for receiving pressure;
a pedestal, for supporting the flexible membrane, provided with a raised portion having a circular bottom face; and
a supporting member bonded to the circular bottom face of the raised portion.
2 . The pressure measuring device as set forth in claim 1 , wherein:
the pedestal is made out of glass and the supporting member is made out of metal.
3 . The pressure measuring device as set forth in claim 1 , wherein:
the pedestal supports the flexible membrane with a silicon substrate interposed therebetween.
4 . The pressure measuring device as set forth in claim 3 , wherein:
the silicon substrate is provided with a recessed portion that is covered by the flexible membrane.
5 . The pressure measuring device as set forth in claim 1 , wherein:
the flexible membrane is made out of silicon.
6 . The pressure measuring device as set forth in claim 1 , wherein:
a closed space is provided between the flexible membrane and the pedestal.