Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same
View Patent ↗A method of forming a polycrystalline silicon layer and an atomic layer deposition apparatus used for the same. The method includes forming an amorphous silicon layer on a substrate, exposing the substrate having the amorphous silicon layer to a hydrophilic or hydrophobic gas atmosphere, placing a mask having at least one open and at least one closed portion over the amorphous silicon layer, irradiating UV light toward the amorphous silicon layer and the mask using a UV lamp, depositing a crystallization-inducing metal on the amorphous silicon layer, and annealing the substrate to crystallize the amorphous silicon layer into a polycrystalline silicon layer. This method and apparatus provide for controlling the seed position and grain size in the formation of a polycrystalline silicon layer.
1. A method of forming a polycrystalline silicon layer, comprising:
forming an amorphous silicon layer on a substrate;
exposing the substrate having the amorphous silicon layer to a hydrophobic gas atmosphere;
placing a mask having an open portion and a closed portion over the amorphous silicon layer;
irradiating UV light at the amorphous silicon layer through the open portion of the mask using a UV lamp;
depositing a crystallization-inducing metal on the amorphous silicon layer; and
annealing the substrate to crystallize the amorphous silicon layer into a polycrystalline silicon layer.
2. The method according to claim 1 , wherein a closed portion of the mask corresponds to a region in which the crystallization-inducing metal will be deposited on the amorphous silicon layer.
3. The method according to claim 1 , wherein the crystallization-inducing metal is deposited only on a region of the amorphous silicon layer masked from the UV light because of a closed portion of the mask.
4. The method according to claim 1 , wherein the hydrophobic gas is at least one of the series of gases C x F y (where x and y are natural numbers).
5. The method according to claim 1 , wherein the crystallization-inducing metal is deposited by atomic layer deposition.
6. The method according to claim 1 , wherein the distance between the mask and the UV lamp is within the range of distances over which the wavelength of the UV lamp maintains linearity.
7. A method of making a thin film transistor comprising a polycrystalline silicon layer, the method comprising:
forming an amorphous silicon layer on a substrate;
exposing the substrate having the amorphous silicon layer to a hydrophobic gas atmosphere;
placing a mask having an open portion and a closed portion over the amorphous silicon layer;
irradiating UV light at the amorphous silicon layer through the open portion of the mask using a UV lamp;
depositing a crystallization-inducing metal on the amorphous silicon layer; and
annealing the substrate to crystallize the amorphous silicon layer into a polycrystalline silicon layer.