Inspection apparatus and inspection method
View Patent ↗According to one embodiment, an inspection apparatus includes a first monochromatic body disposed behind an inspection target including a transparent member or a semitransparent member, relative to an observation position which deviates from a normal direction of the inspection target, a light source configured to illuminate the inspection target and disposed at such a position in front of the inspection target that an image of the light source is not reflected on the inspection target which is observed at the observation position, and a second monochromatic body disposed at such a position in front of the inspection target that an image of the second monochromatic body is reflected on the inspection target which is observed at the observation position.
1. An inspection apparatus comprising:
a first monochromatic body disposed behind an inspection target including a transparent member or a semitransparent member;
a light source configured to illuminate the inspection target and disposed in front of the inspection target; and
a second monochromatic body disposed in front of the inspection target,
wherein an observation position, at which the inspection target is observed, is a position which deviates from a normal direction of the inspection target in front of the inspection target,
wherein the observation position is a position which deviates from a position to which the image of the light source, which is reflected on the inspection target, is regular-reflected, and
wherein the observation position is a position to which the image of the second monochromatic body, which is reflected on the inspection target, is regular-reflected.
2. The inspection apparatus of claim 1 , wherein the second monochromatic body is a light source cover configured to block light traveling from the light source toward the observation position.
3. The inspection apparatus of claim 1 , further comprising a light source cover configured to block light traveling from the light source toward the observation position.
4. The inspection apparatus of claim 1 , further comprising a holding mechanism configured to hold the inspection target, and an adjusting mechanism configured to adjust a hold angle of the inspection target by the holding mechanism.
5. The inspection apparatus of claim 1 , further comprising an imaging device disposed at the observation position and configured to capture an image of the inspection target.